发明授权
- 专利标题: Crystal diameter measuring device
- 专利标题(中): 水晶直径测量装置
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申请号: US158849申请日: 1993-11-29
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公开(公告)号: US5378900A公开(公告)日: 1995-01-03
- 发明人: Yoshihiro Hirano , Masahiko Baba
- 申请人: Yoshihiro Hirano , Masahiko Baba
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX4-319053 19921127
- 主分类号: C30B15/26
- IPC分类号: C30B15/26 ; C30B35/00 ; G01B11/08 ; G01B11/10 ; G01N21/86
摘要:
The growing portion of a single crystal 1 grown by the pull method is recorded and the image signal is output to a digitizing circuit 3 that converts the image signal into binary data. A memory device 4 stores the digitized images and the point P at the boundary between dark and light is detected by scanning the stored digitized images starting from the scanning-start pixel and proceeding in the direction parallel to the direction of single crystal pulling. The diameter D of the growing portion of the single crystal is determined based upon the boundary P, and the scanning-start pixel for the current operation is set at the pixel that is separated from the boundary Pb in the preceding operation by a preset number of pixels d in the opposite direction of the scan.
公开/授权文献
- US6075296A Control circuit 公开/授权日:2000-06-13