发明授权
US5395198A Vacuum loading chuck and fixture for flexible printed circuit panels
失效
用于柔性印刷电路板的真空加载卡盘和夹具
- 专利标题: Vacuum loading chuck and fixture for flexible printed circuit panels
- 专利标题(中): 用于柔性印刷电路板的真空加载卡盘和夹具
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申请号: US901640申请日: 1992-06-19
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公开(公告)号: US5395198A公开(公告)日: 1995-03-07
- 发明人: Thomas P. Duffy , Lewis C. Hecht , Merritt P. Sulger, deceased , Ernst E. Thiele , Mark V. Pierson , Lawrence E. Williams
- 申请人: Thomas P. Duffy , Lewis C. Hecht , Merritt P. Sulger, deceased , Ernst E. Thiele , Mark V. Pierson , Lawrence E. Williams
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: B23P21/00
- IPC分类号: B23P21/00 ; B25H3/02 ; B65G49/07 ; H01L21/00 ; H01L21/673 ; H01L21/677 ; H01L21/683 ; H05K3/00 ; B65G49/06 ; B65H1/00 ; C23C16/00
摘要:
Disclosed is a system for handling large area, in-process, circuit panel layers. The circuit panel layers are thin and flimsy, and require rigid support for certain processing steps. The system includes a peripheral frame fixture for surrounding and supporting the in process circuit panel layer, and a a loading chuck for mounting the in-process circuit panel layer in the peripheral frame fixture. The peripheral frame fixture includes a bottom plate having a central opening to expose the circuit panel layer, a top frame having a corresponding central opening to expose the opposite surface of the circuit panel layer, and a compressive apparatus, as screws, bolts, or the like, for applying a z axis compressive force to the bottom plate, the top frame, and a panel layer therebetween. Optionally, the fixture may include alignment pins or fiducials for aligning the bottom plate, a panel layer, and the top frame, and a robotic interface for a robotic arm to grasp and transfer the peripheral frame fixture. The system also includes a loading chuck for mounting the in-process circuit panel layer in the peripheral frame fixture. The loading chuck includes a peripheral edge for receiving the bottom plate of the peripheral frame fixture. This provides co-planarity of the in-process circuit panel layer, the bottom plate of the peripheral frame fixture, and the vacuum table. The vacuum table is within the area bounded by the peripheral edge of the loading chuck and the peripheral frame of the peripheral frame fixture, and is coplanar with them. The vacuum table includes slidable bearing surfaces, with vacuum apertures for drawing a vacuum to hold the panel in place, and slide actuators for moving the slidable bearing surfaces to apply x-y axis tension to a panel on the bearing surfaces.
公开/授权文献
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