发明授权
- 专利标题： Surface acoustic wave device using highly oriented diamond film
- 专利标题（中）： 表面声波装置采用高取向金刚石薄膜
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申请号： US239132申请日： 1994-05-06
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公开(公告)号： US5402029A公开(公告)日： 1995-03-28
- 发明人: Rie Nakamura , Koji Kobashi
- 申请人： Rie Nakamura , Koji Kobashi
- 申请人地址： JPX Kobe
- 专利权人： Kabushiki Kaisha Kobe Seiko Sho
- 当前专利权人： Kabushiki Kaisha Kobe Seiko Sho
- 当前专利权人地址： JPX Kobe
- 优先权： JPX5-111990 19930514
- 主分类号： H03H9/145
- IPC分类号： H03H9/145 ; H03H9/02 ; H03H9/05 ; H01L41/08
摘要：
A surface acoustic wave device uses a highly oriented diamond film with a planar surface, increasing the propagating velocity of a surface acoustic wave, and fabricating many devices on a large area without polishing processes. The surface acoustic wave device includes the highly oriented diamond films, a piezoelectric film and electrodes which are formed on the diamond film. In the highly oriented diamond film, 80% or more of the surface area of the diamond film is composed of the (100) faces or (111) faces of diamond; and the difference {.DELTA..alpha.,.DELTA..beta.,.DELTA..gamma.} between the Euler angles {.alpha.,.beta.,.gamma.} expressing the crystal orientations of the adjacent (100) or (111) faces of the diamond film simultaneously satisfies the relations of .vertline..DELTA..alpha..vertline..ltoreq.10.degree., .vertline..DELTA..beta..vertline..ltoreq.10.degree., and .vertline..DELTA..gamma..vertline..ltoreq.10.degree..
公开/授权文献
- US4910448A PWM circuit 公开/授权日：1990-03-20