发明授权
- 专利标题: Synchronous sampling scanning force microscope
- 专利标题(中): 同步采样扫描力显微镜
-
申请号: US86592申请日: 1993-07-02
-
公开(公告)号: US5406832A公开(公告)日: 1995-04-18
- 发明人: Ronald C. Gamble , Paul E. West , Marc R. Schuman
- 申请人: Ronald C. Gamble , Paul E. West , Marc R. Schuman
- 申请人地址: CA Santa Clara
- 专利权人: Topometrix Corporation
- 当前专利权人: Topometrix Corporation
- 当前专利权人地址: CA Santa Clara
- 主分类号: G01B21/30
- IPC分类号: G01B21/30 ; G01Q10/00 ; G01Q10/06 ; G01Q60/32 ; G01B5/28 ; G01N23/00
摘要:
The synchronous sampling scanning force microscope includes a reflective cantilever arm having a free end which is oscillated at a frequency different from the resonance frequency of the cantilever arm. The motion of the oscillating cantilever arm is measured, to generate a deflection signal indicative of the amplitude of deflection or phase shift of the cantilever arm. Selected portions of cycles of the output signal are sampled, for generating output signal data indicative of deflection of the near and far excursions of the probe. The method and apparatus permit monitoring of compliance of the surface of the specimen by multiple sampling at a rate greater than the period of oscillation of the cantilever probe of the microscope.
公开/授权文献
- US6116341A Water injection pressurizer 公开/授权日:2000-09-12
信息查询