发明授权
- 专利标题: Optical member made of high-purity and transparent synthetic silica glass and method for production thereof or blank thereof
- 专利标题(中): 由高纯度透明合成石英玻璃制成的光学元件及其制造方法或其空白
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申请号: US779737申请日: 1991-10-23
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公开(公告)号: US5410428A公开(公告)日: 1995-04-25
- 发明人: Shigeru Yamagata , Michiyou Kuriyama , Kyoichi Inaki , Ralf Takke
- 申请人: Shigeru Yamagata , Michiyou Kuriyama , Kyoichi Inaki , Ralf Takke
- 申请人地址: JPX Tokyo DEX Hanau
- 专利权人: Shin-Etsu Quartz Products Co. Ltd.,Heraeus Quarzglas GmbH
- 当前专利权人: Shin-Etsu Quartz Products Co. Ltd.,Heraeus Quarzglas GmbH
- 当前专利权人地址: JPX Tokyo DEX Hanau
- 优先权: JPX2-292483 19901030; JPX2-292484 19901030; JPX2-321736 19901126; JPX2-413881 19901226; JPX2-413885 19901226
- 主分类号: C03B19/14
- IPC分类号: C03B19/14 ; C03B32/00 ; C03C3/06 ; C03C4/00 ; G02B1/00 ; G03F7/20 ; H01S3/034 ; C03C4/08
摘要:
This invention relates to an optical member made of highly transparent, high-purity synthetic silica glass, to a method for manufacturing a blank or an optical member of such glass, and to the optical members themselves. The optical members have an absolute refractive index, n.sub.d, of 1.460 or more and a hydrogen molecule concentration of at least 5.times.10.sup.16 molecules/cm.sup.3 uniformly distributed throughout the glass and are particularly well suited for use in apparatus in which they are exposed to a high-power laser beam such as that produced by an excimer laser.
公开/授权文献
- US5973797A Image reading apparatus 公开/授权日:1999-10-26
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