发明授权
- 专利标题: Method for roughening surface of halocarbon film
- 专利标题(中): 卤化碳膜表面粗糙化的方法
-
申请号: US829193申请日: 1992-02-03
-
公开(公告)号: US5411629A公开(公告)日: 1995-05-02
- 发明人: Timothy J. Warfield
- 申请人: Timothy J. Warfield
- 申请人地址: IL Schaumburg
- 专利权人: Motorola, Inc.
- 当前专利权人: Motorola, Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: H01L21/3105
- IPC分类号: H01L21/3105 ; H01L21/768 ; H05K1/03 ; H05K3/38 ; H01L21/00
摘要:
A method for roughening a principal surface (12) of a halocarbon film (11). The halocarbon film (11) is treated with a colloidal suspension wherein the colloidal suspension includes light metal atoms. The light metal atoms combine with halogen atoms of the halocarbon film, thereby toughening the principal surface (12) and giving the principal surface (12) a burnt appearance.