发明授权
- 专利标题: Solid state imaging device and method for producing the same
- 专利标题(中): 固态成像装置及其制造方法
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申请号: US99493申请日: 1993-07-28
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公开(公告)号: US5416344A公开(公告)日: 1995-05-16
- 发明人: Tohru Ishizuya , Masahiro Shoda , Keiichi Akagawa
- 申请人: Tohru Ishizuya , Masahiro Shoda , Keiichi Akagawa
- 申请人地址: JPX Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX4-220983 19920729; JPX5-075070 19930310
- 主分类号: H01L27/148
- IPC分类号: H01L27/148 ; H01L29/78 ; H01L27/14 ; H01L31/00
摘要:
A solid state imaging device which reduces the occurrence of crosstalk between a plurality of picture elements arranged in a linear or matrix form. The solid state imaging device includes a plurality of photosensitive cells formed on a first principal surface of a semiconductor substrate, a transfer electrode formed in a gap area among the cells on the first principal surface to read out charges produced in the cells, a drive metal wiring formed on the transfer electrode within the gap area, a first insulating film covering the cells with a predetermined thickness, and a plurality of metal reflecting films formed on the first insulating film in such a manner that the whole surface of each of the metal reflecting films forms a reflecting surface substantially parallel to a surface of each of the cells on the side of the first principal surface whereby light passed through the photosensitive cells from a side opposite to the first principal surface is reflected back to each of the photosensitive cells.
公开/授权文献
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