The improved dielectric member for carrying electrostatic latent image comprises a support and an overlying dielectric layer, with a thickness of from 3 to 70 .mu.m, that is formed of an polysiloxane/amic acid copolymer. The dielectric member has a relative dielectric constant of 2.0 to 6.0, a surface hardness of 300 to 1,500 on the Vickers scale, and exhibits high reliability in operating characteristics. It can be produced by a process in which the dielectric layer is formed on the support by applying an inorganic polymer compound film-forming material onto the support, and heating the coated layer in vacuum to cure.