发明授权
- 专利标题: Arrangement for coating substrates
- 专利标题(中): 涂布基材的布置
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申请号: US179216申请日: 1994-01-10
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公开(公告)号: US5423971A公开(公告)日: 1995-06-13
- 发明人: Manfred Arnold , Guido Blang , Rainer Gegenwart , Klaus Michael , Michael Scherer , Jochen Ritter , Oliver Burkhardt
- 申请人: Manfred Arnold , Guido Blang , Rainer Gegenwart , Klaus Michael , Michael Scherer , Jochen Ritter , Oliver Burkhardt
- 申请人地址: DEX Hanau
- 专利权人: Leybold Aktiengesellschaft
- 当前专利权人: Leybold Aktiengesellschaft
- 当前专利权人地址: DEX Hanau
- 优先权: DEX4301189.6 19930119
- 主分类号: C23C16/40
- IPC分类号: C23C16/40 ; C23C16/50 ; C23C16/509 ; C23C16/54 ; H01J37/32 ; C23C14/34
摘要:
The invention relates to an electrode configuration for a device for generating a plasma. RF is coupled contactlessly via a capacitive coupling electrode disposed at the dark space distance into a carrier backside of a coating installation. Dark space shields on the coating side define the plasma zone and prevent the formation of parasitic plasmas. HF substrate bias voltage on the moving substrate carrier is achieved with a defined plasma zone and the development of parasitic plasmas is avoided.
公开/授权文献
- US5983741A Reverse gear assembly of a transmission 公开/授权日:1999-11-16