发明授权
- 专利标题： Semiconductor device for a light wave
- 专利标题（中）： 用于光波的半导体器件
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申请号： US106418申请日： 1993-08-13
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公开(公告)号： US5434433A公开(公告)日： 1995-07-18
- 发明人: Hiroaki Takasu , Yoshikazu Kojima , Kunihiro Takahashi , Tsuneo Yamazaki , Tadao Iwaki
- 申请人： Hiroaki Takasu , Yoshikazu Kojima , Kunihiro Takahashi , Tsuneo Yamazaki , Tadao Iwaki
- 申请人地址： JPX
- 专利权人： Seiko Instruments Inc.
- 当前专利权人： Seiko Instruments Inc.
- 当前专利权人地址： JPX
- 优先权： JPX4-220504 19920819
- 主分类号： G02F1/1335
- IPC分类号： G02F1/1335 ; G02F1/136 ; G02F1/1362 ; G02F1/1368 ; G09G3/36 ; H01L21/77 ; H01L27/12 ; H01L29/786 ; H01L33/00
摘要：
A semiconductor substrate is utilized to integrally form a drive circuit and a pixel array to produce a transparent semiconductor device for a light valve. The semiconductor device for a light valve is constructed by a semiconductor substrate composed of a bulk single crystal silicon having an opaque thick portion and a thin transparent portion. A pixel array is formed in the transparent portion. A drive circuit is formed in a top face of the opaque portion. A transparent support substrate is laminated to the top face of the semiconductor substrate for reinforcement. A bulk portion of the semiconductor substrate is removed from a back face thereof by selective etching to provide the transparent portion.
公开/授权文献
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