发明授权
US5436098A Positive photoresists with enhanced resolution and reduced
crystallization containing novel tetra(hydroxyphenyl)alkanes
失效
正性光致抗蚀剂具有增强的分辨率和减少含有新型四(羟基苯基)烷烃的结晶
- 专利标题: Positive photoresists with enhanced resolution and reduced crystallization containing novel tetra(hydroxyphenyl)alkanes
- 专利标题(中): 正性光致抗蚀剂具有增强的分辨率和减少含有新型四(羟基苯基)烷烃的结晶
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申请号: US180180申请日: 1994-01-11
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公开(公告)号: US5436098A公开(公告)日: 1995-07-25
- 发明人: Reinhard Schulz , Norbert Munzel , Martin Roth , Wilhelm Knobloch
- 申请人: Reinhard Schulz , Norbert Munzel , Martin Roth , Wilhelm Knobloch
- 申请人地址: NY Ardsley
- 专利权人: Ciba-Geigy Corporation
- 当前专利权人: Ciba-Geigy Corporation
- 当前专利权人地址: NY Ardsley
- 优先权: CHX2550/91 19910830; CHX413/92 19920212
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C07C39/15 ; C07C309/71 ; C07C309/76 ; C08K5/42 ; C08L101/00 ; G03F7/022 ; H01L21/027 ; H05K3/00 ; G03F7/023
摘要:
Positive photoresist compositions comprising, in an organic solvent, at leasta) one alkali-soluble resin,b) one photosensitive quinone diazide,c) one aromatic hydroxy compound of formula I ##STR1## wherein each R is --H, C.sub.1 -C.sub.4 alkyl, C.sub.1 -C.sub.4 alkoxy, --OCH.sub.2 C.sub.6 H.sub.5, --OC.sub.6 H.sub.5 or --COOC.sub.1 -C.sub.4 alkyl, and R.sub.1 and R.sub.2 are each independently of the other H, C.sub.1 -C.sub.4 alkyl, --C.sub.6 H.sub.5 or a cycloaliphatic 5- or 6-membered ring, a is an integer from 0 to 4, and m and n are each independently of the other 0, 1 or 2, which compound enhances the photosensitivity and/or the rate of development, and optionallyd) additional customary modifiers, are eminently suitable for making relief structures.
公开/授权文献
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