发明授权
US5436194A Stripe laser diode having an improved efficiency for current confinement
失效
条纹激光二极管具有提高的电流限制效率
- 专利标题: Stripe laser diode having an improved efficiency for current confinement
- 专利标题(中): 条纹激光二极管具有提高的电流限制效率
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申请号: US228453申请日: 1994-04-15
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公开(公告)号: US5436194A公开(公告)日: 1995-07-25
- 发明人: Makoto Kondo , Akira Furuya , Chikashi Anayama , Mami Sugano , Kay Domen , Toshiyuki Tanahashi , Hiroshi Sekiguchi
- 申请人: Makoto Kondo , Akira Furuya , Chikashi Anayama , Mami Sugano , Kay Domen , Toshiyuki Tanahashi , Hiroshi Sekiguchi
- 申请人地址: JPX Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX3-241533 19910920; JPX3-342825 19911225; JPX4-046547 19920304; JPX4-051563 19920310; JPX4-068000 19920326; JPX4-132304 19920525
- 主分类号: G11B7/125
- IPC分类号: G11B7/125 ; H01L33/00 ; H01L33/30 ; H01S5/223 ; H01S5/30 ; H01S5/32 ; H01S5/323 ; H01L21/20
摘要:
A method for fabricating a laser diode, comprises the steps of: forming a first stripe structure defined by a plurality of crystallographically distinct surfaces on a surface of a semiconductor substrate; forming an epitaxial layer of InGaAlP on the semiconductor substrate including the first stripe structure by a decomposition of gaseous source materials of In, Ga, Al and P; wherein the InGaAlP layer is doped to the p-type by incorporating Mg while growing the InGaAlP by adding a gaseous source material of Mg into said source materials of In, Ga, Al and P such that the InGaAlP layer is doped to the p-type with a substantially uniform carrier concentration level irrespective of the crystal surfaces forming the stripe structure.
公开/授权文献
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