发明授权
US5444012A Method for manufacturing semiconductor integrated circuit device having
a fuse element
失效
具有熔丝元件的半导体集成电路器件的制造方法
- 专利标题: Method for manufacturing semiconductor integrated circuit device having a fuse element
- 专利标题(中): 具有熔丝元件的半导体集成电路器件的制造方法
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申请号: US278073申请日: 1994-07-20
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公开(公告)号: US5444012A公开(公告)日: 1995-08-22
- 发明人: Keiichi Yoshizumi , Kazushi Fukuda , Seiichi Ariga , Shuji Ikeda , Makoto Saeki , Kiyoshi Nagai , Soichiro Hashiba , Shinji Nishihara , Fumiyuki Kanai
- 申请人: Keiichi Yoshizumi , Kazushi Fukuda , Seiichi Ariga , Shuji Ikeda , Makoto Saeki , Kiyoshi Nagai , Soichiro Hashiba , Shinji Nishihara , Fumiyuki Kanai
- 申请人地址: JPX Tokyo JPX Tokyo
- 专利权人: Hitachi, Ltd.,Hitachi ULSI Engineering Corp.
- 当前专利权人: Hitachi, Ltd.,Hitachi ULSI Engineering Corp.
- 当前专利权人地址: JPX Tokyo JPX Tokyo
- 优先权: JPX5-178676 19930720
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; H01L21/768 ; H01L21/82 ; H01L21/822 ; H01L21/8244 ; H01L23/522 ; H01L23/525 ; H01L27/04 ; H01L21/70 ; H01L27/00
摘要:
In depositing a silicon oxide film which constitutes part of a final passivation film onto a bonding pad formed on an interlayer insulating film, the silicon oxide depositing step is divided in two stages, and after the first deposition, the bonding pad is once exposed by etching, then the second deposition is performed, whereby the silicon oxide film which has thus been deposited in two stages is formed over a fuse element formed under the interlayer insulating film, while on the bonding pad is formed only the silicon oxide film deposited in the second stage. As a result, at the time of etching polyimide resin, silicon nitride film and silicon oxide film successively to expose the bonding pad, there remains a sufficient thickness of insulating film between the bottom of an aperture which is formed at the same time and the fuse element. Thereafter, an electrical test is conducted while applying a probe to the bonding pad and, where required, the fuse element located under the aperture is cut.
公开/授权文献
- USD318668S Combined radio and light 公开/授权日:1991-07-30
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