发明授权
US5464989A Mask ROM using tunnel current detection to store data and a method of
manufacturing thereof
失效
掩模ROM使用隧道电流检测来存储数据及其制造方法
- 专利标题: Mask ROM using tunnel current detection to store data and a method of manufacturing thereof
- 专利标题(中): 掩模ROM使用隧道电流检测来存储数据及其制造方法
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申请号: US245305申请日: 1994-05-17
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公开(公告)号: US5464989A公开(公告)日: 1995-11-07
- 发明人: Shinichi Mori , Osamu Ueda , Masayuki Yamashita
- 申请人: Shinichi Mori , Osamu Ueda , Masayuki Yamashita
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX3-024733 19910219; JPX3-085486 19910417
- 主分类号: G11C11/56
- IPC分类号: G11C11/56 ; H01L21/8246 ; H01L27/112 ; H01L49/02
摘要:
Each of the portions corresponding to the crossings of a plurality of first strip conductive layers serving as bit lines and a plurality of second strip conductive layers serving as word lines crossing the conductive layers at right angles is used as one memory cell. An oxide film is provided between the first strip conductive layers and the second strip conductive layers. The thickness of this oxide film is set in each memory cell according to stored data. Also a multi-value memory can be realized, since the amount of stored data in each memory cell is an arbitrary amount of 1 bit or more by making the stored data of a plurality of types of memory cells having different thicknesses in the tunnel oxide film 15 correspond to a plurality of different data. The size of each memory cell can be reduced since the occupying area of each memory cell on the semiconductor substrate is dependent on the width of the first strip conductive layer and the second strip conductive layer. An insulation film in which tunnel phenomenon is generated can be formed using conventional manufacturing technology.
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