发明授权
- 专利标题： Processing method and apparatus thereof
- 专利标题（中）： 处理方法及装置
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申请号： US138439申请日： 1993-10-20
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公开(公告)号： US5474641A公开(公告)日： 1995-12-12
- 发明人: Hayashi Otsuki , Yoichi Deguchi
- 申请人： Hayashi Otsuki , Yoichi Deguchi
- 申请人地址： JPX Tokyo
- 专利权人： Tokyo Electron Kabushiki Kaisha
- 当前专利权人： Tokyo Electron Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX4-309412 19921023
- 主分类号： C23C16/44
- IPC分类号： C23C16/44 ; C23C8/06 ; C30B33/12 ; H01L21/00 ; H01L21/302 ; H01L21/3065 ; H01L21/683 ; H01L21/687 ; C23F1/02
摘要：
The present invention relates to a processing chamber that processes an object to be processed in an atmosphere of a processing gas. The processing chamber is provided with a mounting stand having a holder mechanism that holds the object to be processed within the processing chamber. The mounting stand is connected to a rotational mechanism and is free to rotate, and the holder mechanism on the mounting stand is also provided with a separate, independent rotational mechanism whereby the front surface and rear surface of the object to be processed can be rotated (inverted) relative to the mounting stand. Thus the present invention provides a processing method and apparatus therefor in which the front surface and rear surface of the object to be processed can be processed under the same conditions, without having to change the atmospheric status of the object to be processed.
公开/授权文献
- US5994305A Method of treating inflammation 公开/授权日：1999-11-30
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