Invention Grant
US5483090A Solid-state image pickup device and method for manufacturing such device 失效
固体摄像装置及其制造方法

Solid-state image pickup device and method for manufacturing such device
Abstract:
A plurality of channel separting regions are formed on a substrate with a space therebetween to segment an channel region. A first insulating layer is formed on the substrate, and a polycrystalline silicon layer is formed thereon and is then subject to patterning so as to provide a plurality of first transfer electrodes in the direction crossing the channel separating region. A second insulating layer is formed on the first transfer electrode and on the substrate having been exposed by the patterning, and a second transfer electrodes are formed at a position between the first transfer electrodes on the second insulating layer. By setting the thickness of each transfer electrodes and the each insulating layer to a predetermined value, the interference of the visible light is controlled, and the transparency rate of the visible light is improved. Further, by increasing the thickness of the transfer electrode at regions other than the light-receiving region, the contact with the electrode is improved, and the operation at regions other than the light-receiving region is improved.
Public/Granted literature
Information query
Patent Agency Ranking
0/0