Invention Grant
US5488231A Metal/semiconductor junction Schottky diode optical device using a
distortion grown layer
失效
金属/半导体结肖特基二极管光器件使用失真生长层
- Patent Title: Metal/semiconductor junction Schottky diode optical device using a distortion grown layer
- Patent Title (中): 金属/半导体结肖特基二极管光器件使用失真生长层
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Application No.: US352628Application Date: 1994-12-09
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Publication No.: US5488231APublication Date: 1996-01-30
- Inventor: O-Kyun Kwon , Young-Wan Choi , El-Hang Lee
- Applicant: O-Kyun Kwon , Young-Wan Choi , El-Hang Lee
- Applicant Address: KRX Daejeon-shi
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KRX Daejeon-shi
- Priority: KRX94-30898 19941123
- Main IPC: H01L29/47
- IPC: H01L29/47 ; G02F1/015 ; G02F3/00 ; G02F3/02 ; H01L29/12 ; H01L29/872 ; H01L31/0352 ; H01L31/10 ; H01L31/108 ; H01L27/14 ; H01L31/00
Abstract:
A metal/semiconductor junction Schottky diode optical device using a distortion grown layer is described. A plurality of GaAs mirror and AlAs mirror layers are periodically grown on a semi-insulating GaAs substrate. An n+ or p+ semiconductor layer is formed on the GaAs mirror and AlAs mirror layers. A GaAs buffer layer is formed on the semiconductor layer to grow a Schottky metal layer serving as an electrode and a mirror. A multiple quantum well structure having an electro-optical absorption characteristic is positioned between the semiconductor layer and Schottky metal layer, for constructing a diode with the metal layer/multiple quantum well structure. At least a part of the mirror layers and diode are formed with a layer in order to have resonance and non-resonance conditions between the metal layer and mirror layers. The substrate on which the diode is formed has an opposite side formed with an optical non-reflective layer.
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