发明授权
US5498506A Positive-acting radiation-sensitive mixture and recording material
produced therewith
失效
正向辐射敏感性混合物和由其制成的记录材料
- 专利标题: Positive-acting radiation-sensitive mixture and recording material produced therewith
- 专利标题(中): 正向辐射敏感性混合物和由其制成的记录材料
-
申请号: US362491申请日: 1995-01-09
-
公开(公告)号: US5498506A公开(公告)日: 1996-03-12
- 发明人: Horst Wengenroth , Horst Roeschert , Walter Spiess , Gerhard Buhr , Georg Pawlowski
- 申请人: Horst Wengenroth , Horst Roeschert , Walter Spiess , Gerhard Buhr , Georg Pawlowski
- 申请人地址: DEX Frankfurt
- 专利权人: Hoechst Aktiengesellschaft
- 当前专利权人: Hoechst Aktiengesellschaft
- 当前专利权人地址: DEX Frankfurt
- 优先权: DEX4222968.5 19920713
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/039 ; G03F7/075 ; H01L21/027 ; G03C1/492
摘要:
The invention relates to a radiation-sensitive mixture comprising a) a binder which is insoluble in water but soluble or at least swellable in aqueous alkaline solution, b) a compound which forms an acid under the action of actinic radiation and c) a compound which contains at least one C-O-C or C-O-Si bond which can be cleaved by an acid, wherein said mixture additionally contains 0.1 to 70 mol %, based on the maximum amount of acid which can theoretically be produced from the compound b), of at least one compound having at least one nitrogen atom in an amine or amide bond. The mixture is used in particular in the production of electronic components. The invention also relates to a recording material having a substrate and a radiation-sensitive coating.
公开/授权文献
信息查询
IPC分类: