发明授权
- 专利标题: Process for producing microstructure metallic elements
- 专利标题(中): 微结构金属元素生产工艺
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申请号: US208296申请日: 1994-03-10
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公开(公告)号: US5501784A公开(公告)日: 1996-03-26
- 发明人: Christoph Lessmo/ llmann , Joachim Eicher , Holger Reinecke
- 申请人: Christoph Lessmo/ llmann , Joachim Eicher , Holger Reinecke
- 申请人地址: DEX Dortmund
- 专利权人: Microparts GmbH
- 当前专利权人: Microparts GmbH
- 当前专利权人地址: DEX Dortmund
- 优先权: DEX4307869.9 19930312
- 主分类号: B22C7/00
- IPC分类号: B22C7/00 ; B22C7/02 ; B22F3/12 ; B29C33/42 ; B29C39/02 ; B29C39/26 ; B81B1/00 ; B81C99/00 ; C23C14/00 ; H01L21/48 ; C25D1/00
摘要:
A microstructured mold with at least one open cavity is produced from a solid body (metal, ceramic, glass, stone or monocrystalline material) by precision mechanical machining, additive or subtractive structuring. The cavity is filled and the mold covered by a flowable material and the solidified flowable material is separated from the mold giving a microstructure element. Alternatively, the top portion of the solidified flowable material is removed to expose the surface of the mold and the solidified material filling the cavity. A layer of conductive material is applied to the exposed surface and remaining solidified material. Then the conductive layer and the remaining solidified material are separated from the mold to provide a structure with a shape complementary to the mold. A layer of metal is electrodeposited on the complementary structure and, finally, the metal layer is separated to produce a metallic microstructure element. The microstructure elements produced by the process have good material properties and can be prepared in a broad range of shapes and structures.
公开/授权文献
- US4373707A Construction including a gas spring 公开/授权日:1983-02-15
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