发明授权
- 专利标题： Stage driving system
- 专利标题（中）： 舞台驾驶系统
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申请号： US19579申请日： 1993-02-18
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公开(公告)号： US5504407A公开(公告)日： 1996-04-02
- 发明人: Shinji Wakui , Mikio Sato , Katsumi Asada
- 申请人： Shinji Wakui , Mikio Sato , Katsumi Asada
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX4-070070 19920221; JPX4-084974 19920309
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G05B19/19 ; G06F15/46
摘要：
A stage driving system capable of positioning an object with a higher speed and a higher precision than prior systems. The system includes a base member, plural movable members provided on the base member, and a controller for controlling the plural movable members so as to substantially suppress the vibration of the base member caused by the displacements of the plural movable members.
公开/授权文献
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