公开(公告)号：US5504407A

公开(公告)日：1996-04-02

申请号：US19579

申请日：1993-02-18

申请人： Shinji Wakui ,  Mikio Sato ,  Katsumi Asada

发明人： Shinji Wakui ,  Mikio Sato ,  Katsumi Asada

IPC分类号： G03F7/20 ,  G05B19/19 ,  G06F15/46

CPC分类号： G03F7/70733 ,  G03F7/70716 ,  G03F7/709 ,  G05B19/195

摘要： A stage driving system capable of positioning an object with a higher speed and a higher precision than prior systems. The system includes a base member, plural movable members provided on the base member, and a controller for controlling the plural movable members so as to substantially suppress the vibration of the base member caused by the displacements of the plural movable members.

摘要翻译： 一种舞台驱动系统，能够以比现有系统更高的速度和更高的精度定位物体。 该系统包括基座构件，设置在基座构件上的多个可动构件，以及用于控制多个可动构件的控制器，以便基本上抑制由多个可动构件的位移引起的基座构件的振动。

公开(公告)号：US5511930A

公开(公告)日：1996-04-30

申请号：US24473

申请日：1993-03-01

申请人： Mikio Sato ,  Katsumi Asada ,  Shinji Wakui

发明人： Mikio Sato ,  Katsumi Asada ,  Shinji Wakui

IPC分类号： G03F9/00 ,  G03F7/20 ,  G05B5/01 ,  G05B19/19 ,  G05D3/12 ,  H01L21/027 ,  H01L21/30 ,  G01M7/00

CPC分类号： G03F7/709 ,  G05B19/19 ,  G05B5/01 ,  G05B2219/37275 ,  G05B2219/37313 ,  G05B2219/41117 ,  G05B2219/41179 ,  G05B2219/41181 ,  G05B2219/41195 ,  G05B2219/41346 ,  G05B2219/41367 ,  G05B2219/41457 ,  G05B2219/42104 ,  G05B2219/45026 ,  G05B2219/49258 ,  G05B2219/49271 ,  G05B2219/50046

摘要： A precision positioning apparatus suitable for the positioning control system of a semiconductor exposing apparatus such as a stepper has, as its object, the provision of a non-contact type precision positioning apparatus capable of properly correcting the disturbance of posture or vibration based on low rigidityy which is a feature of a non-contact guide mechanism and accomplishing stable, highly accurate positioning at a high speed. The precision positioning apparatus is provided with a base plate, a movable member positioned on the base plate, a driving device for driving the movable member, a detecting device for detecting movement of the movable member, and a device for supplying the driving device with a signal regarding the movement of the movable member on the basis of a reference value and the output value from the detecting device. The supplying device includes a device for forming a correction signal for substantially negating a disturbance force to the movable member, by the use of the signal supplied to the driving device and the output from the detecting device. The signal supplied to the driving device can be corrected by the correction signal.

摘要翻译： 作为适用于步进机等半导体曝光装置的定位控制系统的精密定位装置，目的在于提供一种能够根据低刚性正确地矫正姿势或振动的不接触型的精确定位装置 这是非接触引导机构的特征，并且以高速实现稳定，高精度的定位。 该精密定位装置设置有基板，位于基板上的可动构件，用于驱动可动构件的驱动装置，检测可动构件的移动的检测装置，以及用于向驱动装置供给 基于参考值和来自检测装置的输出值的可移动部件的移动的信号。 供给装置包括用于通过使用提供给驱动装置的信号和来自检测装置的输出来形成用于基本上消除对可动构件的干扰力的校正信号的装置。 可以通过校正信号校正提供给驱动装置的信号。

公开(公告)号：US07016749B2

公开(公告)日：2006-03-21

申请号：US10267569

申请日：2002-10-10

申请人： Seigo Kuzumaki ,  Yoshio Shirai ,  Takatoshi Negishi ,  Kazuhiro Miyauchi ,  Masato Kato ,  Katsuhiko Kato ,  Yasushi Okamoto ,  Shouichi Okumura ,  Mikio Sato ,  Yoshiki Konishi ,  Morio Oba ,  Koji Sato ,  Junichi Harada ,  Shigeharu Ueyama ,  Koji Eguchi ,  Goro Takahashi

发明人： Seigo Kuzumaki ,  Yoshio Shirai ,  Takatoshi Negishi ,  Kazuhiro Miyauchi ,  Masato Kato ,  Katsuhiko Kato ,  Yasushi Okamoto ,  Shouichi Okumura ,  Mikio Sato ,  Yoshiki Konishi ,  Morio Oba ,  Koji Sato ,  Junichi Harada ,  Shigeharu Ueyama ,  Koji Eguchi ,  Goro Takahashi

IPC分类号： G06F19/00

CPC分类号： G06F17/5095

摘要： A product design CAD data reconstruction unit 50 reconstructs product design CAD data used for product evaluation regarding an initial design so as to fulfill restrictive conditions obtained from the product evaluation based on a product structure for the initial design. The reconstructed product design CAD data is stored in a product design CAD data database 90. Upon reception of a corrected design obtained by correcting the initial design, the product design CAD data for the initial design is read from the product design CAAD data database 90, and the product design CAD data is corrected along a design surface of the corrected design.

摘要翻译： 产品设计CAD数据重建单元50重建用于关于初始设计的产品评估的产品设计CAD数据，以便实现基于初始设计的产品结构从产品评估获得的限制条件。 重建产品设计CAD数据存储在产品设计CAD数据数据库90中。 在接收到通过校正初始设计获得的校正设计后，从产品设计CAAD数据数据库90读取用于初始设计的产品设计CAD数据，并且沿着校正设计的设计表面校正产品设计CAD数据。

公开(公告)号：US06984945B2

公开(公告)日：2006-01-10

申请号：US10667356

申请日：2003-09-23

申请人： Mikio Sato

发明人： Mikio Sato

IPC分类号： H02K41/00

CPC分类号： G03F7/70758 ,  G05B2219/41337 ,  H02K29/06 ,  H02K41/03 ,  H02P25/06

摘要： A linear motor apparatus which drives a mover of a linear motor in a stable manner, by using only information on change of relative position, without using an absolute value sensor. The apparatus has a coil array of plural phases of coils and a magnet relatively movable to the coil array, plural drivers, at least one of which being provided for each phase, to feed a current to all the same phase coils of the coil array, a sensor for measuring a change of relative position of the magnet moved by the current to the coil array, and a controller to determine the polarity of the current applied to the same phase coils based on the change of the relative position measured by the sensor, and apply a drive current to drive the magnet in a desired direction to the same phase coils.

公开(公告)号：US5726879A

公开(公告)日：1998-03-10

申请号：US401677

申请日：1995-03-10

申请人： Mikio Sato

发明人： Mikio Sato

IPC分类号： G05B13/02 ,  G03F7/20 ,  G05B5/01 ,  G05B13/04 ,  G05B19/19 ,  G05D3/12 ,  G05B19/18 ,  G11B21/02

CPC分类号： G03F7/70725 ,  G03F7/709 ,  G05B13/042 ,  G05B19/19 ,  G05B5/01 ,  G05B2219/41367 ,  G05B2219/42012 ,  Y02P90/265

摘要： Provided is high-performance H.sub..infin. control technology suitable for position control or speed control of semiconductor exposure apparatus, servo writer of hard disk, etc. A series compensator in the classical control technology represented by the PID compensator is employed as a frequency weight of loop shaping, whereby the design technology in the conventional classical control can be succeeded to and a high-performance control system can be realized even for cases where there is an oscillation mode of a controlled object to become a problem on control performance in the servo band, which was difficult to realize by the classical control technology. Also, using a robust stabilizing compensator obtained from a generalized plant having constant matrix weights, a high-performance control system can be realized even for cases where there is an oscillation mode of the controlled object to become a problem on control performance in the servo band, which was difficult to realize by the conventional classical control technology.

摘要翻译： 提供适用于半导体曝光装置，硬盘伺服写入器等的位置控制或速度控制的高性能H INFINITY控制技术。采用PID补偿器代表的经典控制技术中的串联补偿器作为循环的频率权重 可以使传统的经典控制中的设计技术成功，并且即使在控制对象的振荡模式成为伺服带中的控制性能的问题的情况下也能够实现高性能的控制系统， 这是经典控制技术难以实现的。 此外，使用从具有恒定矩阵权重的广义工厂获得的鲁棒稳定补偿器，即使在受控对象的振荡模式成为伺服带的控制性能的问题的情况下，也可以实现高性能控制系统 ，这是传统的古典控制技术难以实现的。

公开(公告)号：US4694098A

公开(公告)日：1987-09-15

申请号：US761885

申请日：1985-08-02

申请人： Yoichi Hirai ,  Tsunenori Fujii ,  Kaoru Koto ,  Kenji Suzuki ,  Masahiro Yoshida ,  Hisashi Okawa ,  Yoshiaki Okabe ,  Teruo Kitamura ,  Hisao Yokokura ,  Shintaroo Hattori ,  Akio Mukoh ,  Mikio Sato

发明人： Yoichi Hirai ,  Tsunenori Fujii ,  Kaoru Koto ,  Kenji Suzuki ,  Masahiro Yoshida ,  Hisashi Okawa ,  Yoshiaki Okabe ,  Teruo Kitamura ,  Hisao Yokokura ,  Shintaroo Hattori ,  Akio Mukoh ,  Mikio Sato

IPC分类号： C07C29/00 ,  C07C29/147 ,  C07C31/137 ,  C07C43/164 ,  C07C43/168 ,  C07C43/21 ,  C07C43/225 ,  C07C43/23 ,  C07C57/46 ,  C07C69/75 ,  C07C69/76 ,  C07C69/78 ,  C07C255/53 ,  C07D239/26 ,  C09K19/00 ,  C09K19/20 ,  C09K19/30 ,  C09K19/32 ,  C09K19/34 ,  C07C179/00 ,  C07C69/74

CPC分类号： C07D239/26 ,  C07C255/00 ,  C07C29/00 ,  C07C29/147 ,  C07C31/137 ,  C07C43/168 ,  C07C43/21 ,  C07C43/225 ,  C07C43/23 ,  C07C57/46 ,  C09K19/2007 ,  C09K19/3003 ,  C09K19/3068 ,  C09K19/32 ,  C09K19/321 ,  C09K19/3402 ,  C09K19/3458 ,  C09K19/3475 ,  C09K2019/3425

摘要： A colorless liquid crystalline compound having at least one 6-membered ring and non-cyclic end groups in the molecular skeleton, said 6-membered ring containing two or more carbon atoms, at least one of which is directly bonded to a methylene group of a non-cyclic group having an alkoxy group at another end has a wide mesomorphic range. When said colorless liquid crystalline compound is mixed with a liquid crystal composition, the resulting mixture also has an enlarged mesomorphic range and in almost all cases has a reduced viscosity.

公开(公告)号：US4146706A

公开(公告)日：1979-03-27

申请号：US759627

申请日：1977-01-17

申请人： Kenichi Hisatsuka ,  Saburo Ishiyama ,  Akira Inoue ,  Osamu Tsumura ,  Mikio Sato

发明人： Kenichi Hisatsuka ,  Saburo Ishiyama ,  Akira Inoue ,  Osamu Tsumura ,  Mikio Sato

IPC分类号： C08B37/00 ,  C12P19/04 ,  A61K31/70 ,  C07H15/04

CPC分类号： C12P19/04 ,  C08B37/00 ,  Y10S435/83

摘要： Polysaccharides forming gels are produced by cultivating a microorganism such as Arthrobacter carbazolum FERM 2574 in a suitable medium.

公开(公告)号：US4026706A

公开(公告)日：1977-05-31

申请号：US481701

申请日：1974-06-21

申请人： Shinichi Nakamura ,  Hidehiko Ishikawa ,  Katsuo Mogaki ,  Mikio Sato ,  Shui Sato ,  Masahiko Taguchi ,  Haruhiko Sato

发明人： Shinichi Nakamura ,  Hidehiko Ishikawa ,  Katsuo Mogaki ,  Mikio Sato ,  Shui Sato ,  Masahiko Taguchi ,  Haruhiko Sato

IPC分类号： G03C7/00 ,  G03C7/32 ,  G03C3/00 ,  G03C1/40

CPC分类号： G03C7/3225

摘要： A silver halide photosensitive element using specifically defined yellow, magenta and cyan color couplers in the individual respectively blue, green and red-sensitive layers.

摘要翻译： 一种卤化银感光元件，分别在各自的蓝色，绿色和红色敏感层中使用特定的黄色，品红色和青色成色剂。

公开(公告)号：US07700011B2

公开(公告)日：2010-04-20

申请号：US12130062

申请日：2008-05-30

申请人： Takeshi Gouko ,  Kenji Echizen ,  Mikio Sato ,  Akio Koshita

发明人： Takeshi Gouko ,  Kenji Echizen ,  Mikio Sato ,  Akio Koshita

IPC分类号： B29C33/38 ,  B29C45/00

CPC分类号： C10M137/04 ,  B29C33/60 ,  B29C45/2632 ,  B29C49/48 ,  C10M2223/0405 ,  C10N2240/204 ,  Y10S425/115 ,  Y10S425/81

摘要： A boundary lubricant film 1 is formed on a stamper 22 contact portion of a stationary mirror 21 and/or a stationary mirror 21 contact portion of the stamper 22. The boundary lubricant film 1 contains one of kinds of phosphate esters. A material is injected into a cavity 14. As a result, a disc substrate for an optical disc is molded.

摘要翻译： 边界润滑剂膜1形成在压模22的固定镜21和/或固定镜21接触部分的压模22接触部分上。边界润滑剂膜1含有磷酸酯之一。 将材料注入空腔14.结果，模制用于光盘的盘基片。

公开(公告)号：US5305193A

公开(公告)日：1994-04-19

申请号：US469375

申请日：1990-01-24

申请人： Shinji Shinnaka ,  Mikio Sato ,  Masahiro Morisada

发明人： Shinji Shinnaka ,  Mikio Sato ,  Masahiro Morisada

IPC分类号： G05B13/02 ,  G06F15/46

CPC分类号： G05B13/024

摘要： In an adaptive apparatus for adaptively adjusting parameters in a system, the parameters of the system are adjusted in accordance with an integral relationship. At that moment, one or both of a scalar and a matrix which depend on time are used as gains. Furthermore, adjustment in accordance with a proportional relationship is used together. Also in this adjustment, one or both of a scalar and a matrix which depend on time are used as gains.

摘要翻译： 在用于自适应地调整系统中的参数的自适应装置中，根据积分关系来调整系统的参数。 在那一刻，一个或两个标量和一个取决于时间的矩阵被用作增益。 此外，根据比例关系进行调整。 同样在该调整中，依赖于时间的标量和矩阵中的一个或两者被用作增益。