发明授权
- 专利标题: CMOS thin-film transistor having split gate structure
- 专利标题(中): 具有分离栅结构的CMOS薄膜晶体管
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申请号: US392621申请日: 1995-02-22
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公开(公告)号: US5528056A公开(公告)日: 1996-06-18
- 发明人: Takayuki Shimada , Toshihiro Yamashita , Yasuhiro Matsushima , Yoji Yoshimura , Yutaka Takafuji
- 申请人: Takayuki Shimada , Toshihiro Yamashita , Yasuhiro Matsushima , Yoji Yoshimura , Yutaka Takafuji
- 申请人地址: JPX Osaka
- 专利权人: Sharp Kabushiki Kaisha
- 当前专利权人: Sharp Kabushiki Kaisha
- 当前专利权人地址: JPX Osaka
- 优先权: JPX2-338879 19901130; JPX2-338880 19901130
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L29/76
摘要:
A thin-film semiconductor device having a CMOS inverter comprising a pair of n-type and p-type thin-film transistors, wherein the gate electrode of at least one of the paired thin-film transistors comprises a plurality of gate electrode sections spaced apart along the channel length. The channel region of the n-type thin-film transistor is doped with p-type impurities. This structure serves to reduce the leakage current and maintain high OFF resistance for a high source-drain voltage. Further, since a good symmetry of characteristics is maintained between the n-type and p-type thin-film transistors that constitute the CMOS inverter, no appreciable bias is caused in the output voltage of the CMOS inverter.
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