发明授权
US5529880A Photoresist with a mixture of a photosensitive esterified resin and an
o-naphthoquinone diazide compound
失效
用感光酯化树脂和邻萘醌二叠氮化合物的混合物进行光刻
- 专利标题: Photoresist with a mixture of a photosensitive esterified resin and an o-naphthoquinone diazide compound
- 专利标题(中): 用感光酯化树脂和邻萘醌二叠氮化合物的混合物进行光刻
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申请号: US413081申请日: 1995-03-29
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公开(公告)号: US5529880A公开(公告)日: 1996-06-25
- 发明人: Anthony Zampini , Peter Trefonas, III
- 申请人: Anthony Zampini , Peter Trefonas, III
- 申请人地址: MA Marlborough
- 专利权人: Shipley Company, L.L.C.
- 当前专利权人: Shipley Company, L.L.C.
- 当前专利权人地址: MA Marlborough
- 主分类号: G03F7/022
- IPC分类号: G03F7/022 ; C08G8/28 ; C08L61/04 ; C08L61/14 ; G03F7/023 ; H01L21/027 ; G03F7/30
摘要:
A photoresist that is a mixture of the esterification product of an o-quinonediazide compound and a novolak resin and a high molecular weight phenol having from 2 to 5 phenolic groups and at least 4 diazo naphthoquinone groups. The extent of esterification of the novolak resin is up to 20 percent of the hydroxyl groups and the degree of esterification of the phenol is at least 50 percent of the phenolic hydroxyl groups. The preferred novolak resins are the aromatic novolak resin that are the condensation product of a reactive phenol with a bis(hydroxymethyl)phenol or an aromatic aldehyde, each alone or in the presence of a reactive phenol.
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