发明授权
US5541124A Method for making bipolar transistor having double polysilicon structure
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制造具有双重多晶硅结构的双极晶体管的方法
- 专利标题: Method for making bipolar transistor having double polysilicon structure
- 专利标题(中): 制造具有双重多晶硅结构的双极晶体管的方法
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申请号: US477471申请日: 1995-06-07
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公开(公告)号: US5541124A公开(公告)日: 1996-07-30
- 发明人: Hiroyuki Miwa , Shigeru Kanematsu , Takayuki Gomi , Hiroaki Anmo , Takashi Noguchi , Katsuyuki Kato , Hirokazu Ejiri , Norikazu Ouchi
- 申请人: Hiroyuki Miwa , Shigeru Kanematsu , Takayuki Gomi , Hiroaki Anmo , Takashi Noguchi , Katsuyuki Kato , Hirokazu Ejiri , Norikazu Ouchi
- 申请人地址: JPX Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX5-062982 19930228; JPX5-062985 19930228; JPX5-098789 19930331; JPX5-098791 19930331; JPX5-098792 19930331; JPX5-098793 19930331; JPX5-098795 19930331; JPX5-098796 19930331
- 主分类号: H01L21/331
- IPC分类号: H01L21/331 ; H01L29/732 ; H01L21/265
摘要:
A semiconductor device and a manufacturing method therefor which can simultaneously realize both a reduction in base transit time by a reduction in base width and a reduction in base resistance by a reduction in link base resistance. The semiconductor device is manufactured by the method including the steps of forming a first impurity diffused layer of a first conduction type in a semiconductor substrate; forming a conducting film connected to the first impurity diffused layer; forming a first insulating film on the conducting film; forming a first hole through a laminated film composed of the first insulating film and the conducting film; forming a second impurity diffused layer of the first conduction type in the semiconductor substrate exposed to the first hole; forming a side wall from a second insulating film in the first hole to form a second hole; and forming a third impurity diffused layer of the first conduction type in the semiconductor substrate exposed to the second hole.
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