发明授权
- 专利标题： Estimation method and apparatus for semiconductor light emitting element capable of inspecting by wafer
- 专利标题（中）： 能够通过晶片检查的半导体发光元件的估计方法和装置
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申请号： US285533申请日： 1994-08-04
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公开(公告)号： US5541416A公开(公告)日： 1996-07-30
- 发明人: Syoichi Washizuka
- 申请人： Syoichi Washizuka
- 申请人地址： JPX Kawasaki
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JPX Kawasaki
- 优先权： JPX5-196419 19930806
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; G01N21/95 ; G01R31/26 ; H01S5/00 ; G01N21/64
摘要：
A luminous efficiency is estimated by obtaining a life time a of few carriers controlling the luminous efficiency. An estimation method inadiates pulsed laser light for exciting carriers in a light emitting layer by a co-focal point optical system, at a specified position of the light emitting layer of a light emitting element formed on a surface of a wafer. A life time is obtained by detecting the fluorescent light emitted from the specified position in the light emitting layer corresponding to an irradiation of the pulsed laser light and by observing a change of the fluorescent light with lapse of a time. A luminous efficiency is estimated at the specified position in the light emitting layer from the life time on the basis of a correlation of a life time and a luminous efficiency previously obtained, thereby enabling an estimation of the light emitting element at a wafer stage without destroying the wafer and without contact therewith.
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