发明授权
US5549798A Wet processing apparatus having individual reactivating feedback paths
for anode and cathode water
失效
湿处理设备具有用于阳极和阴极水的单独的再激活反馈路径
- 专利标题： Wet processing apparatus having individual reactivating feedback paths for anode and cathode water
- 专利标题（中）： 湿处理设备具有用于阳极和阴极水的单独的再激活反馈路径
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申请号： US409306申请日： 1995-03-24
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公开(公告)号： US5549798A公开(公告)日： 1996-08-27
- 发明人: Hiroshi Kitajima , Hidemitsu Aoki , Haruto Hamano , Makoto Morita , Yoshimi Shiramizu , Masaharu Nakamori , Kaori Watanabe , Hirofumi Seo , Yuji Shimizu , Makoto Iuchi , Yasushi Sasaki , Nahomi Ohta
- 申请人： Hiroshi Kitajima , Hidemitsu Aoki , Haruto Hamano , Makoto Morita , Yoshimi Shiramizu , Masaharu Nakamori , Kaori Watanabe , Hirofumi Seo , Yuji Shimizu , Makoto Iuchi , Yasushi Sasaki , Nahomi Ohta
- 申请人地址： JPX Tokyo
- 专利权人： NEC Corporation
- 当前专利权人： NEC Corporation
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX6-056108 19940325; JPX6-056110 19940325
- 主分类号： C02F1/461
- IPC分类号： C02F1/461 ; H01L21/00 ; C25F7/02 ; C25B15/02 ; C25B15/08
摘要：
In a wet processing apparatus, an electrolytic cell, a first storing cell for storing anode active water of the electrolytic cell, a first processing cell for processing a target with the anode active water of the first storing cell, a second storing cell for storing cathode active water of the electrolytic cell, and a second processing cell for processing a target with the cathode active water of the second storing cell are provided. Also, a first reactivating feedback path is provided between the first processing cell and an anode region of the electrolytic cell, and a second reactivating feedback path is provided between the second processing cell and a cathode region of the electrolytic cell.
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