发明授权
- 专利标题: High-frequency induction heating coil
- 专利标题(中): 高频感应加热线圈
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申请号: US456102申请日: 1995-05-30
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公开(公告)号: US5550354A公开(公告)日: 1996-08-27
- 发明人: Masanori Kimura , Hirotoshi Yamagishi
- 申请人: Masanori Kimura , Hirotoshi Yamagishi
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX6-141265 19940531
- 主分类号: C30B13/20
- IPC分类号: C30B13/20 ; H05B6/30 ; H05B6/36 ; H05B6/40
摘要:
A high-frequency induction heating coil is provided which enables a semiconductor single crystal in the process of growth to incorporate impurities uniformly therein, permits ready adjustment of the heat distributing property, and precludes the discharge of electricity across a slit. The high-frequency induction heating coil comprises a pair of annular conductors 21 and 22, a pair of power source terminals 23a and 23b for feeding a high-frequency electric current to the pair of annular conductors 21 and 22, and a plurality of small coils 24a through 24f and 25a through 25f having the pair of annular conductors as opposite electrodes and projecting toward the axis of the pair of annular conductors extending from a first annular conductor 21 to a second annular conductor 22.
公开/授权文献
- US4994945A Lamp system for operating theatres and the like 公开/授权日:1991-02-19