发明授权
US5552181A Method for supplying liquid material and process for forming thin films
using the liquid material supplying method
失效
使用液体材料供给方法提供液体材料的方法和用于形成薄膜的工艺
- 专利标题： Method for supplying liquid material and process for forming thin films using the liquid material supplying method
- 专利标题（中）： 使用液体材料供给方法提供液体材料的方法和用于形成薄膜的工艺
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申请号： US170789申请日： 1993-12-21
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公开(公告)号： US5552181A公开(公告)日： 1996-09-03
- 发明人: Eiichi Kondoh , Toru Mitomo , Hiroshi Yamamoto , Tomohiro Ohta
- 申请人： Eiichi Kondoh , Toru Mitomo , Hiroshi Yamamoto , Tomohiro Ohta
- 申请人地址： JPX Hyogo
- 专利权人： Kawasaki Steel Corporation
- 当前专利权人： Kawasaki Steel Corporation
- 当前专利权人地址： JPX Hyogo
- 优先权： JPX4-340088 19921221; JPX5-068261 19930326
- 主分类号： C23C16/20
- IPC分类号： C23C16/20 ; C23C16/448 ; H01L21/205 ; H01L21/31 ; H01L21/3205 ; H01L23/52 ; C23C16/00
摘要：
A method of supplying, in a gaseous phase, a material which is in a viscous liquid phase at normal temperature. The viscous liquid material is provided in a bubbler and the pressure of the vessel is maintained below atmospheric pressure. A carrier gas is supplied through a nozzle opening in the liquid material inside the vessel. The carrier gas is temporarily dissolved in the liquid and then released to form fine bubbles into which the liquid material is vaporized, so that the vapor of the material is supplied together with the carrier gas.
公开/授权文献
- US4817564A Water heater construction 公开/授权日：1989-04-04
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