发明授权
- 专利标题： Methods and apparatus for treating a work surface
- 专利标题（中）： 用于处理工作表面的方法和设备
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申请号： US232063申请日： 1994-04-28
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公开(公告)号： US5562841A公开(公告)日： 1996-10-08
- 发明人: Pavel Kulik , Vladimir Ivanov
- 申请人： Pavel Kulik , Vladimir Ivanov
- 申请人地址： NLX Amsterdam
- 专利权人： Overseas Publishers Association (Amsterdam) BV
- 当前专利权人： Overseas Publishers Association (Amsterdam) BV
- 当前专利权人地址： NLX Amsterdam
- 优先权： RUX5006147 19911101; RUX5006148 19911101; RUX5006149 19911101
- 主分类号： H05H1/34
- IPC分类号： H05H1/34 ; C23C4/12 ; C23C16/513 ; H05H1/42 ; B23K10/00
摘要：
A work surface, e.g. an integrated circuit, is treated with a plasma jet. The work surface is shielded from an ambient medium by a shielding gas jet directed to create a shielded zone around the work surface, or which is blown over the work surface so it intersects the plasma jet on the work surface.
公开/授权文献
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