发明授权
- 专利标题： Rotating floating magnetron dark-space shield and cone end
- 专利标题（中）： 旋转磁控管暗空间屏蔽和锥端
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申请号： US285869申请日： 1994-08-04
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公开(公告)号： US5567289A公开(公告)日： 1996-10-22
- 发明人: Clifford L. Taylor , Daniel T. Crowley
- 申请人： Clifford L. Taylor , Daniel T. Crowley
- 申请人地址： MN Faribault
- 专利权人： Viratec Thin Films, Inc.
- 当前专利权人： Viratec Thin Films, Inc.
- 当前专利权人地址： MN Faribault
- 主分类号： H01J37/34
- IPC分类号： H01J37/34 ; C23C14/35
摘要：
A rotatable magnetron cathode having at least one supported end adapted for attachment to a spindle. At least one dark space shield is attached to the cathode at a supported end to rotate therewith, and is electrically floating relative to the cathode. If the cathode is cantilever mounted, a floating cone end shield, facing away from the gas discharge and not overlapping the cylindrical cathode wall, is used at the free end.
公开/授权文献
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