发明授权
- 专利标题: Alignment of magnetic poles of thin film transducer
- 专利标题(中): 薄膜换能器的磁极对准
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申请号: US498169申请日: 1995-07-05
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公开(公告)号: US5578342A公开(公告)日: 1996-11-26
- 发明人: Ut Tran , Tai Lee , Tran Son
- 申请人: Ut Tran , Tai Lee , Tran Son
- 申请人地址: CA Milpitas
- 专利权人: Read-Rite Corporation
- 当前专利权人: Read-Rite Corporation
- 当前专利权人地址: CA Milpitas
- 主分类号: G11B5/31
- IPC分类号: G11B5/31 ; B05D5/12 ; B05D1/18 ; C23C14/32 ; C25D5/02
摘要:
A process for producing a thin film magnetic head uses the upper magnetic pole as a self-aligning mask for partially trimming the lower magnetic pole, wherein the yoke and pole tip regions to be trimmed are processed by separate and distinct photolithographic steps, thereby achieving noncritical alignment in the yoke area, while maintaining critical alignment in the pole tip region which includes the transducing gap.
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