公开(公告)号：US5578342A

公开(公告)日：1996-11-26

申请号：US498169

申请日：1995-07-05

申请人： Ut Tran ,  Tai Lee ,  Tran Son

发明人： Ut Tran ,  Tai Lee ,  Tran Son

IPC分类号： G11B5/31 ,  B05D5/12 ,  B05D1/18 ,  C23C14/32 ,  C25D5/02

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： A process for producing a thin film magnetic head uses the upper magnetic pole as a self-aligning mask for partially trimming the lower magnetic pole, wherein the yoke and pole tip regions to be trimmed are processed by separate and distinct photolithographic steps, thereby achieving noncritical alignment in the yoke area, while maintaining critical alignment in the pole tip region which includes the transducing gap.

摘要翻译： 用于制造薄膜磁头的方法使用上磁极作为自对准掩模，用于部分修整下磁极，其中要修整的磁轭和磁极尖端区域通过分开且不同的光刻步骤进行处理，由此实现非临界 同时在包括换能间隙的极尖区域保持临界对准。

公开(公告)号：US20150200350A1

公开(公告)日：2015-07-16

申请号：US14152899

申请日：2014-01-10

申请人： Arman Hajati ,  Ut Tran ,  Darren Imai ,  Martin Schoeppler

发明人： Arman Hajati ,  Ut Tran ,  Darren Imai ,  Martin Schoeppler

IPC分类号： H01L41/053 ,  H01L41/25 ,  H01L41/33 ,  H01L41/047 ,  B06B1/06

CPC分类号： B06B1/0622 ,  B06B1/0688 ,  H01L41/098 ,  H01L41/313 ,  H01L41/331 ,  Y10T29/42

摘要： Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.

摘要翻译： 为微加工压电换能器阵列提供机械支撑的技术和机制。 在一个实施例中，换能器阵列包括换能器元件，每个换能器元件包括设置在该膜部分的周边上或周围的相应的膜部分和相应的支撑结构。 换能器元件最初形成在牺牲晶片上，其中换能器元件的支撑结构有助于随后去除牺牲晶片和/或随后处理换能器元件。 在另一个实施方案中，聚合物层设置在换能器元件上以在随后的处理期间提供柔性支撑。

公开(公告)号：US08834728B1

公开(公告)日：2014-09-16

申请号：US13045394

申请日：2011-03-10

申请人： Yufeng Hu ,  Shawn M. Tanner ,  Ut Tran ,  Zhongyan Wang ,  Mirzafer Abatchev

发明人： Yufeng Hu ,  Shawn M. Tanner ,  Ut Tran ,  Zhongyan Wang ,  Mirzafer Abatchev

IPC分类号： B44C1/22 ,  H01B13/00 ,  G11B7/1387 ,  G11B5/48

CPC分类号： G11B5/4866 ,  G11B7/1387

摘要： A method provides an EAMR transducer. The EAMR transducer is coupled with a laser and has an ABS configured to reside in proximity to a media during use. The method includes providing an NFT using an NFT mask. The NFT resides proximate to the ABS and focuses the laser energy onto the media. A portion of the NFT mask is removed, forming a heat sink mask covering part of the NFT. Optical material(s) are deposited, covering the heat sink mask and the NFT. The heat sink mask is removed, providing an aperture in the optical material(s). A heat sink corresponding to the aperture is provided. The heat sink bottom is thermally coupled with the NFT. A write pole for writing to the media and coil(s) for energizing the write pole are provided. The write pole has a bottom surface thermally coupled with the top surface of the heat sink.

摘要翻译： 一种方法提供一种EAMR传感器。 EAMR传感器与激光器耦合并且具有被配置为在使用期间驻留在介质附近的ABS。 该方法包括使用NFT掩码提供NFT。 NFT靠近ABS，并将激光能量聚焦到介质上。 去除NFT掩模的一部分，形成覆盖NFT部分的散热掩模。 沉积光学材料，覆盖散热掩模和NFT。 去除散热掩模，在光学材料中提供孔。 提供对应于孔的散热器。 散热器底部与NFT热耦合。 提供用于写入介质的写入极和用于激励写入极的线圈。 写极具有与散热器的顶表面热耦合的底表面。

公开(公告)号：US08488272B1

公开(公告)日：2013-07-16

申请号：US13433587

申请日：2012-03-29

申请人： Ut Tran ,  Zhigang Bai ,  Kevin K. Lin

发明人： Ut Tran ,  Zhigang Bai ,  Kevin K. Lin

IPC分类号： G11B5/127

CPC分类号： G11B5/315 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A magnetic recording transducer includes a main pole including a nose portion, the nose portion terminating at an air-bearing surface (ABS). The magnetic recording transducer further includes at least one coil having a coil front distal from the ABS, and at least one side shield, the at least one side shield extending from at the ABS to not further than the coil front.

摘要翻译： 磁记录传感器包括一个主极，其包括一个鼻部，鼻部终止在空气轴承表面（ABS）处。 磁记录传感器还包括至少一个线圈，其具有远离ABS的线圈前端，以及至少一个侧屏蔽，所述至少一个侧屏蔽件从ABS延伸到不超过线圈前端。

公开(公告)号：US08077434B1

公开(公告)日：2011-12-13

申请号：US11942113

申请日：2007-11-19

申请人： Yong Shen ,  Lei Larry Zhang ,  Yingjian Chen ,  Ut Tran

发明人： Yong Shen ,  Lei Larry Zhang ,  Yingjian Chen ,  Ut Tran

IPC分类号： G11B5/147

CPC分类号： G11B5/1278 ,  G11B5/3116

摘要： A method and system for providing a magnetic transducer having an air-bearing surface (ABS) are described. The magnetic transducer includes a base layer, a perpendicular magnetic recording (PMR) pole on the base layer, an additional pole, a write shield, a write gap between the PMR pole and a portion of the write shield, and coil(s) that energize at least the additional pole. The base layer includes a first portion proximate to the ABS and a second portion recessed from the ABS. The first portion is nonmagnetic, while the second portion is magnetic. The PMR pole has a first front portion proximate to the ABS. The additional pole has a second front portion recessed from the ABS. At least a portion of the additional pole resides between the PMR pole and write shield. At least a portion of the write gap resides on the front portion of the PMR pole.

摘要翻译： 描述了一种用于提供具有空气轴承表面（ABS）的磁换能器的方法和系统。 磁换能器包括基层，基层上的垂直磁记录（PMR）极，附加极，写屏蔽，PMR极与写屏蔽的一部分之间的写间隙，以及线圈， 至少激励附加极点。 基层包括靠近ABS的第一部分和从ABS凹陷的第二部分。 第一部分是非磁性的，而第二部分是磁性的。 PMR杆具有靠近ABS的第一前部。 附加的杆具有从ABS凹入的第二前部。 附加极点的至少一部分位于PMR极和写保护罩之间。 写入间隙的至少一部分位于PMR极的前部。

公开(公告)号：US20090226135A1

公开(公告)日：2009-09-10

申请号：US12454059

申请日：2009-05-12

申请人： Ut Tran ,  Hamid Eslampour

发明人： Ut Tran ,  Hamid Eslampour

IPC分类号： G02B6/42

CPC分类号： G02B6/4232 ,  G02B6/422 ,  G02B6/4227 ,  G02B6/423 ,  H01S5/0224 ,  H01S5/02268 ,  H01S5/02272

摘要： Optical components may be precisely positioned in three dimensions with respect to one another. A bonder which has the ability to precisely position the components in two dimensions can be utilized. The components may be equipped with contacts at different heights so that as the components come together in a third dimension, their relative positions can be sensed. This information may be fed back to the bonder to control the precise alignment in the third dimension.

摘要翻译： 光学部件可以相对于彼此精确地定位在三维空间中。 可以利用具有将二次元件精确定位的能力的接合器。 组件可以配备有不同高度的触点，使得当组件在第三维度中组合时，可以感测它们的相对位置。 该信息可以反馈到接合器以控制第三维度中的精确对准。

公开(公告)号：US10586912B2

公开(公告)日：2020-03-10

申请号：US15353695

申请日：2016-11-16

申请人： Dimitre Latev ,  Arman Hajati ,  Darren Todd Imai ,  Ut Tran

发明人： Dimitre Latev ,  Arman Hajati ,  Darren Todd Imai ,  Ut Tran

IPC分类号： H01L41/04 ,  H01L41/29 ,  B32B37/14 ,  B06B1/06 ,  H01L41/047 ,  H01L41/09 ,  B32B37/12 ,  B32B37/18

摘要： A plurality of transducer elements are formed. For each of the plurality of transducer elements, an electrode of the transducer element is formed on a first side of a support layer. A piezoelectric element of the transducer element is formed on the first side of the support layer. An interconnect of the transducer element is formed in the support layer. The support layer is thinned to expose a second side of the support layer. The interconnects of the plurality of transducer elements extend between the first side and the second side of the support layer. The second side of the support layer is bonded to a flexible layer with an adhesive material. Conductive fillers are disposed in the adhesive material. The interconnects of the plurality of transducer elements are each electrically coupled via the conductive fillers to the corresponding interconnect extending through the flexible layer.

公开(公告)号：US09604255B2

公开(公告)日：2017-03-28

申请号：US14152899

申请日：2014-01-10

申请人： Arman Hajati ,  Ut Tran ,  Darren Todd Imai ,  Martin Schoeppler

发明人： Arman Hajati ,  Ut Tran ,  Darren Todd Imai ,  Martin Schoeppler

IPC分类号： H01L41/33 ,  B06B1/06 ,  H01L41/09 ,  H01L41/313 ,  H01L41/331

CPC分类号： B06B1/0622 ,  B06B1/0688 ,  H01L41/098 ,  H01L41/313 ,  H01L41/331 ,  Y10T29/42

摘要： Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.

公开(公告)号：US20150158052A1

公开(公告)日：2015-06-11

申请号：US14103672

申请日：2013-12-11

申请人： Dimitre Latev ,  Arman Hajati ,  Darren Todd Imai ,  Ut Tran

发明人： Dimitre Latev ,  Arman Hajati ,  Darren Todd Imai ,  Ut Tran

IPC分类号： B06B1/02 ,  B06B1/06 ,  H01L41/04 ,  B32B37/24

CPC分类号： H01L41/042 ,  B06B1/0622 ,  B32B37/12 ,  B32B37/185 ,  B32B2457/00 ,  H01L41/0475 ,  H01L41/098 ,  H01L41/29 ,  Y10T156/10

摘要： Techniques and structures for providing flexibility of a micromachined transducer array. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein.

摘要翻译： 提供微机械传感器阵列的灵活性的技术和结构。 在一个实施例中，换能器阵列包括多个换能器元件，每个换能器元件包括压电元件和设置在支撑层中或支撑层上的一个或多个电极。 支撑层结合到包括聚合物材料的柔性层，其中换能器阵列的灵活性部分地来自柔性层的总厚度。 在另一个实施例中，换能器阵列的灵活性部分地由其中形成的一个或多个弯曲结构导致。

公开(公告)号：US08456963B1

公开(公告)日：2013-06-04

申请号：US12758319

申请日：2010-04-12

申请人： Yufeng Hu ,  Ruolin Li ,  Ut Tran ,  Jinshan Li

发明人： Yufeng Hu ,  Ruolin Li ,  Ut Tran ,  Jinshan Li

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  G11B5/4866 ,  G11B5/6088 ,  G11B2005/0021

摘要： An energy assisted magnetic recording (EAMR) disk drive comprises a suspension and a slider having a back side, a laser-facing surface, and an air-bearing surface (ABS) opposite the back side. The slider is mounted to the suspension on the back side. The disk drive further comprises an EAMR transducer coupled with the slider, a portion of the EAMR transducer residing in proximity to the ABS and on the laser-facing surface of the slider. The disk drive further comprises a laser coupled with the suspension and having a light emitting surface facing the laser-facing surface of the slider. The laser has an optic axis substantially parallel to the suspension. The laser provides energy substantially along the optic axis and is optically coupled with the EAMR transducer via free space. The EAMR transducer receives the energy from the laser and writes to the media using the energy.

摘要翻译： 能量辅助磁记录（EAMR）盘驱动器包括悬架和具有背面，面向激光的表面和与背面相对的空气轴承表面（ABS）的滑块。 滑块安装在背面的悬架上。 磁盘驱动器还包括与滑动器耦合的EAMR换能器，位于ABS附近的EAMR换能器的一部分和滑块的面向激光的表面。 磁盘驱动器还包括与悬架连接并具有面向滑块的面向激光的表面的发光表面的激光器。 激光器具有基本上平行于悬架的光轴。 激光器基本沿光轴提供能量，并通过自由空间与EAMR传感器光学耦合。 EAMR传感器从激光器接收能量，并使用能量写入介质。