发明授权
- 专利标题: Micromechanical anchor structure
- 专利标题(中): 微机械锚结构
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申请号: US509368申请日: 1995-07-31
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公开(公告)号: US5583291A公开(公告)日: 1996-12-10
- 发明人: Ronald J. Gutteridge , Daniel N. Koury, Jr.
- 申请人: Ronald J. Gutteridge , Daniel N. Koury, Jr.
- 申请人地址: IL Schaumburg
- 专利权人: Motorola, Inc.
- 当前专利权人: Motorola, Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: G01L1/14
- IPC分类号: G01L1/14 ; G01P15/08 ; G01P15/125 ; G01P15/00 ; G01L9/12 ; H01G7/00
摘要:
A micromachined structure having at least one anchor that includes a supporting substrate with a first and a second foot fixedly positioned on the surface of the substrate and each foot has a supporting edge, which edges are positioned in parallel spaced apart relationship, an elongated tether positioned in spaced relation from the surface of the substrate and extending from the micromachined structure parallel to the parallel supporting edges of the first and the second foot, and first and second risers extending along the supporting edges of the first foot and the second foot, respectively, and rising upwardly to the edges of the tether. The first and the second foot, the first and second risers and the tether being formed integrally by surface micromachining.
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