发明授权
- 专利标题: Semiconductor memory device having stacked capacitors
- 专利标题(中): 具有层叠电容器的半导体存储器件
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申请号: US324352申请日: 1994-10-17
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公开(公告)号: US5583358A公开(公告)日: 1996-12-10
- 发明人: Shinichiro Kimura , Naotaka Hashimoto , Yoshio Sakai , Tokuo Kure , Yoshifumi Kawamoto , Toru Kaga , Eiji Takeda
- 申请人: Shinichiro Kimura , Naotaka Hashimoto , Yoshio Sakai , Tokuo Kure , Yoshifumi Kawamoto , Toru Kaga , Eiji Takeda
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX63-1213 19880108; JPX1-045400 19890228; JPX1-045401 19890228
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L29/417 ; H01L29/45
摘要:
A semiconductor memory device having STC cells wherein the major portions of active regions consisting of channel-forming portions are inclined at an angle of 45 degrees with respect to word lines and bit lines that meet at right angles with each other, thereby enabling the storage capacity portions to be arranged very densely and a sufficiently large capacity to be maintained with very small cell areas. Since the storage capacity portions are formed even on the bit lines, the bit lines are shielded, so that the capacity decreases between the bit lines and, hence, the memory array noise decreases. It is also possible to design the charge storage capacity portion so that a part of thereof has a form of a wall substantially vertical to the substrate in order to increase the capacity.
公开/授权文献
- US4948018A Nozzles 公开/授权日:1990-08-14
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