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    Method of fabricating stacked capacitor cell memory devices
    1.
    发明授权
    Method of fabricating stacked capacitor cell memory devices 失效
    叠层电容器单元存储器件的制造方法

    公开(公告)号：US5374576A

    公开(公告)日：1994-12-20

    申请号：US72482

    申请日：1993-06-03

    申请人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto ,  Toru Kaga ,  Eiji Takeda

    发明人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto ,  Toru Kaga ,  Eiji Takeda

    IPC分类号： H01L27/108 ,  H01L29/417 ,  H01L29/45 ,  H01L21/265 ,  H01L21/70 ,  H01L27/00

    CPC分类号： H01L27/10808 ,  H01L27/10817 ,  H01L29/41775 ,  H01L29/456

    摘要： A semiconductor memory device having STC cells wherein the major portions of active regions consisting of channel-forming portions are inclined at an angle of 45 degrees with respect to word lines and bit lines that meet at right angles with each other, thereby enabling the storage capacity portions to be arranged very densely and a sufficiently large capacity to be maintained with very small cell areas. Since the storage capacity portions are formed even on the bit lines, the bit lines are shielded, so that the capacity decreases between the bit lines and, hence, the memory array noise decreases. It is also possible to design the charge storage capacity portion so that a part of thereof has a form of a wall substantially vertical to the substrate in order to increase the capacity.

    摘要翻译： 具有STC单元的半导体存储器件，其中由沟道形成部分组成的有源区的主要部分相对于彼此成直角相交的字线和位线以45度的角度倾斜，从而使得存储容量 部分布置非常密集，并且具有足够大的容量以保持非常小的单元格区域。 由于存储容量部分甚至在位线上形成，所以位线被屏蔽，使得位线之间的容量减小，因此存储器阵列噪声减小。 也可以设计电荷存储容量部分，使得其一部分具有基本上垂直于衬底的壁的形式，以增加容量。

    Semiconductor memory device
    2.
    发明授权
    Semiconductor memory device 失效
    半导体存储器件

    公开(公告)号：US06878586B2

    公开(公告)日：2005-04-12

    申请号：US10458271

    申请日：2003-06-11

    申请人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto ,  Toru Kaga ,  Eiji Takeda

    发明人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto ,  Toru Kaga ,  Eiji Takeda

    IPC分类号： H01L27/108 ,  H01L29/417 ,  H01L29/45 ,  H01L21/8242

    CPC分类号： H01L27/10817 ,  H01L27/10808 ,  H01L29/41775 ,  H01L29/456

    摘要： A semiconductor memory device having STC cells wherein the major portions of active regions consisting of channel-forming portions are inclined at an angle of 45 degrees with respect to word lines and bit lines that meet at right angles with each other, thereby enabling the storage capacity portions to be arranged very densely and a sufficiently large capacity to be maintained with very small cell areas. Since the storage capacity portions are formed even on the bit lines, the bit lines are shielded, so that the capacity decreases between the bit lines and, hence, the memory array noise decreases. It is also possible to design the charge storage capacity portion so that a part of thereof has a form of a wall substantially vertical to the substrate in order to increase the capacity.

    摘要翻译： 具有STC单元的半导体存储器件，其中由沟道形成部分组成的有源区的主要部分相对于彼此成直角相交的字线和位线以45度的角度倾斜，从而使得存储容量 部分布置非常密集，并且具有足够大的容量以保持非常小的单元格区域。 由于存储容量部分甚至在位线上形成，所以位线被屏蔽，使得位线之间的容量减小，因此存储器阵列噪声减小。 也可以设计电荷存储容量部分，使得其一部分具有基本上垂直于衬底的壁的形式，以增加容量。

    Semiconductor memory device
    3.
    发明授权
    Semiconductor memory device 失效
    半导体存储器件

    公开(公告)号：US5591998A

    公开(公告)日：1997-01-07

    申请号：US443106

    申请日：1995-05-17

    申请人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto ,  Toru Kaga ,  Eiji Takeda

    发明人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto ,  Toru Kaga ,  Eiji Takeda

    IPC分类号： H01L27/108 ,  H01L29/417 ,  H01L29/45

    CPC分类号： H01L27/10808 ,  H01L27/10817 ,  H01L29/41775 ,  H01L29/456

    摘要： A semiconductor memory device having STC cells wherein the major portions of active regions consisting of channel-forming portions are inclined at an angle of 45 degrees with respect to word lines and bit lines that meet at right angles with each other, thereby enabling the storage capacity portions to be arranged very densely and a sufficiently large capacity to be maintained with very small cell areas. Since the storage capacity portions are formed even on the bit lines, the bit lines are shielded, so that the capacity decreases between the bit lines and, hence, the memory array noise decreases. It is also possible to design the charge storage capacity portion so that a part of thereof has a form of a wall substantially vertical to the substrate in order to increase the capacity.

    摘要翻译： 具有STC单元的半导体存储器件，其中由沟道形成部分组成的有源区的主要部分相对于彼此成直角相交的字线和位线以45度的角度倾斜，从而使得存储容量 部分布置非常密集，并且具有足够大的容量以保持非常小的单元格区域。 由于存储容量部分甚至在位线上形成，所以位线被屏蔽，使得位线之间的容量减小，因此存储器阵列噪声减小。 也可以设计电荷存储容量部分，使得其一部分具有基本上垂直于衬底的壁的形式，以增加容量。

    Semiconductor memory device having stacked capacitors
    4.
    发明授权
    Semiconductor memory device having stacked capacitors 失效
    具有层叠电容器的半导体存储器件

    公开(公告)号：US5583358A

    公开(公告)日：1996-12-10

    申请号：US324352

    申请日：1994-10-17

    申请人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto ,  Toru Kaga ,  Eiji Takeda

    发明人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto ,  Toru Kaga ,  Eiji Takeda

    IPC分类号： H01L27/108 ,  H01L29/417 ,  H01L29/45

    CPC分类号： H01L27/10808 ,  H01L27/10817 ,  H01L29/41775 ,  H01L29/456

    摘要： A semiconductor memory device having STC cells wherein the major portions of active regions consisting of channel-forming portions are inclined at an angle of 45 degrees with respect to word lines and bit lines that meet at right angles with each other, thereby enabling the storage capacity portions to be arranged very densely and a sufficiently large capacity to be maintained with very small cell areas. Since the storage capacity portions are formed even on the bit lines, the bit lines are shielded, so that the capacity decreases between the bit lines and, hence, the memory array noise decreases. It is also possible to design the charge storage capacity portion so that a part of thereof has a form of a wall substantially vertical to the substrate in order to increase the capacity.

    摘要翻译： 具有STC单元的半导体存储器件，其中由沟道形成部分组成的有源区的主要部分相对于彼此成直角相交的字线和位线以45度的角度倾斜，从而使得存储容量 部分布置非常密集，并且具有足够大的容量以保持非常小的单元格区域。 由于存储容量部分甚至在位线上形成，所以位线被屏蔽，使得位线之间的容量减小，因此存储器阵列噪声减小。 也可以设计电荷存储容量部分，使得其一部分具有基本上垂直于衬底的壁的形式，以增加容量。

    Semiconductor memory device having stacked capacitor cells
    5.
    发明授权
    Semiconductor memory device having stacked capacitor cells 失效
    具有层叠电容器单元的半导体存储器件

    公开(公告)号：US5140389A

    公开(公告)日：1992-08-18

    申请号：US475148

    申请日：1990-02-05

    申请人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto ,  Toru Kaga ,  Eiji Takeda

    发明人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto ,  Toru Kaga ,  Eiji Takeda

    IPC分类号： H01L27/108

    CPC分类号： H01L27/10817

    摘要： A semiconductor memory device having STC cells wherein the major portions of active regions consisting of channel-forming portions are inclined at an angle of 45 degrees with respect to word lines and bit lines that meet at right angles with each other, thereby enabling the storage capacitor portions to be arranged very densely and a sufficiently large capacitance to be maintained with very small cell areas. Since the storage capacitor portions are formed even on the bit lines, the bit lines are shielded, so that the capacitance decreases between the bit lines and, hence, the memory array noise decreases. It is also possible to design the charge storage capacitor portion so that a part thereof is in the form of a wall substantially vertical to the substrate in order to increase the capacitance.

    摘要翻译： 具有STC单元的半导体存储器件，其中由沟道形成部分组成的有源区的主要部分相对于彼此成直角相交的字线和位线以45度的角度倾斜，从而使得存储电容器 要非常密集地布置的部分和足够大的电容以保持非常小的电池区域。 由于存储电容器部分甚至在位线上形成，所以位线被屏蔽，使得位线之间的电容减小，因此存储器阵列噪声减小。 也可以设计电荷存储电容器部分，使得其一部分呈基本上垂直于衬底的壁的形式，以增加电容。

    Semiconductor memory device having stacked capacitor cells
    6.
    发明授权
    Semiconductor memory device having stacked capacitor cells 失效
    具有层叠电容器单元的半导体存储器件

    公开(公告)号：US4970564A

    公开(公告)日：1990-11-13

    申请号：US287881

    申请日：1988-12-21

    申请人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto

    发明人： Shinichiro Kimura ,  Naotaka Hashimoto ,  Yoshio Sakai ,  Tokuo Kure ,  Yoshifumi Kawamoto

    IPC分类号： H01L27/04 ,  H01L21/822 ,  H01L21/8242 ,  H01L27/10 ,  H01L27/108

    CPC分类号： H01L27/10808

    摘要： A semiconductor memory device having STC cells wherein major portions of active regions consisting of channel-forming portions are tilted at an angle of 45.degree. with respect to the word lines and the bit lines that meet at right angles with each other, enabling the storage capacity portions to be arranged very densely and sufficiently large capacities to be maintained with very small cell areas. In the semiconductor memory device, furthermore, the storage capacity portions are formed even on the bit lines. Therefore, the bit lines are shielded, the capacitance between the bit lines decreases, and the memory array noise decreases.

    摘要翻译： 具有STC单元的半导体存储器件，其中由沟道形成部分组成的有源区的主要部分相对于彼此成直角相交的字线和位线以45°的角度倾斜，使得存储容量 部分布置得非常密集和足够大的容量保持非常小的单元格区域。 此外，在半导体存储器件中，即使在位线上形成存储容量部分。 因此，位线被屏蔽，位线之间的电容减小，并且存储器阵列噪声降低。

    Semiconductor integrated circuit device
    10.
    发明授权
    Semiconductor integrated circuit device 失效
    半导体集成电路器件

    公开(公告)号：US5619055A

    公开(公告)日：1997-04-08

    申请号：US429882

    申请日：1995-04-27

    申请人： Satoshi Meguro ,  Kiyofumi Uchibori ,  Norio Suzuki ,  Makoto Motoyoshi ,  Atsuyoshi Koike ,  Toshiaki Yamanaka ,  Yoshio Sakai ,  Toru Kaga ,  Naotaka Hashimoto ,  Takashi Hashimoto ,  Shigeru Honjou ,  Osamu Minato

    发明人： Satoshi Meguro ,  Kiyofumi Uchibori ,  Norio Suzuki ,  Makoto Motoyoshi ,  Atsuyoshi Koike ,  Toshiaki Yamanaka ,  Yoshio Sakai ,  Toru Kaga ,  Naotaka Hashimoto ,  Takashi Hashimoto ,  Shigeru Honjou ,  Osamu Minato

    IPC分类号： H01L21/8244 ,  H01L27/11 ,  H01L29/76

    CPC分类号： H01L27/1104 ,  H01L27/11 ,  H01L27/1108 ,  Y10S257/903 ,  Y10S257/904

    摘要： A memory cell of the type employing a pair of cross-coupled CMOS inverters of a SRAM is disclosed in which the load MISFETs are stacked above the semiconductor substrate and over the drive MISFETs. Each load MISFET of a memory cell consists of a source, drain and channel region formed of a semiconductor strip, such as a polycrystalline silicon film strip, and a gate electrode consisting of a different layer conductive film than that of the drive MISFETs. In a memory cell having such a stacked arrangement, the source region and gate electrode of each load MISFET thereof are patterned to have a widely overlapping relationship with each other to form a capacitor element thereacross such that an increase in the overall capacitance associated with each of the memory cell storage nodes is effected thereby decreasing occurrence of soft error. The overlapping relationship for effecting the large capacitor element across the source and gate of the respective load MISFETs is provided by an ion implanting scheme of a p-type impurity into the semiconductor strip. A separate mask for ion-implantation for the formation of the source region of the load MISFET is added followed by the addition of the gate electrode thereof in a manner so as to have a widely overlapping relationship with that of the source region.

    摘要翻译： 公开了采用SRAM的一对交叉耦合CMOS反相器的类型的存储单元，其中负载MISFET堆叠在半导体衬底之上和驱动MISFET之上。 存储单元的每个负载MISFET由诸如多晶硅膜条的半导体条形成的源极，漏极和沟道区域以及由不同于导电膜的驱动MISFET组成的栅电极构成。 在具有这种堆叠布置的存储器单元中，每个负载MISFET的源极区域和栅电极被图案化以具有彼此广泛重叠的关系，以形成电容器元件，使得与每个负载MISFET相关联的总体电容的增加 存储单元存储节点被实现，从而减少软错误的发生。 通过p型杂质离子注入到半导体条中的方式来提供跨越各个负载MISFET的源极和栅极的大电容器元件的重叠关系。 添加用于形成负载MISFET的源极区域的离子注入的单独的掩模，然后以与源极区域具有广泛重叠的关系的方式添加其栅电极。