发明授权
- 专利标题: Method for making ceramic substrates from thin and thick ceramic greensheets
- 专利标题(中): 从薄而厚的陶瓷板制造陶瓷基板的方法
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申请号: US333010申请日: 1994-11-01
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公开(公告)号: US5601672A公开(公告)日: 1997-02-11
- 发明人: Jon A. Casey , Dinesh Gupta , James R. Wylder
- 申请人: Jon A. Casey , Dinesh Gupta , James R. Wylder
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: C04B35/111
- IPC分类号: C04B35/111 ; C04B35/622 ; H01L21/48 ; H01L23/538 ; H05K1/03 ; H05K3/40 ; H05K3/46 ; B32B31/12 ; B32B31/26
摘要:
Method for producing ceramic laminates from a plurality of greensheet layers which include one or more thin greensheet layers, e.g. having a thickness less than about 3 mils, with interposed patterned circuit layers and conductive vias, while avoiding the loss of strength and the distortion encountered when paste compositions are pre-applied to such thin greensheet layers. The invention avoids the aforementioned problems by the use of a plurality of greensheet layers including thicker, paste-resistant greensheet layers having a thickness greater than the thin greensheet layer, e.g., between 5 and 10 mils, each pair of the thicker greensheet layers confining therebetween an unscreened thin greensheet layer, one of the thicker greensheet layers also being screened with the circuit pattern layer normally applied to the interposed thin greensheet layer. Thereafter the superposed layers are laminated and sintered to form the composite.
公开/授权文献
- US4970546A Exposure control device 公开/授权日:1990-11-13
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