发明授权
- 专利标题: Fabrication of quantum confinement semiconductor light-emitting devices
- 专利标题(中): 量子限制半导体发光器件的制造
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申请号: US581287申请日: 1995-12-29
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公开(公告)号: US5607876A公开(公告)日: 1997-03-04
- 发明人: David K. Biegelsen , Nicholas K. Sheridon , Noble M. Johnson
- 申请人: David K. Biegelsen , Nicholas K. Sheridon , Noble M. Johnson
- 申请人地址: CT Stamford
- 专利权人: Xerox Corporation
- 当前专利权人: Xerox Corporation
- 当前专利权人地址: CT Stamford
- 主分类号: H01L33/06
- IPC分类号: H01L33/06 ; H01L33/08 ; H01L33/34 ; H01L21/20
摘要:
The present invention consists of an electroluminescent structure and method of fabrication of that structure in materials which have an indirect bandgap in their bulk form. The processing steps can all be standard VLSI methods. Quantum columns, quantum wires or quantum dots may be formed, for example in an array, by masking, reactive ion etching and oxidation. When the semiconductor core is sufficiently thin, quantum mechanical confinement effects raise the energy and the radiative recombination efficiency of injected carriers. Tuning the core diameters allows selection of individual or multiple wavelength emission bands.
公开/授权文献
- US5248074A Five axis riveter and system 公开/授权日:1993-09-28
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