发明授权
- 专利标题： Method of making a self cooling electrically programmable fuse
- 专利标题（中）： 制造自制电可编程保险丝的方法
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申请号： US407431申请日： 1995-03-17
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公开(公告)号： US5622892A公开(公告)日： 1997-04-22
- 发明人: Raschid J. Bezama , Dominic J. Schepis , Krishna Seshan
- 申请人： Raschid J. Bezama , Dominic J. Schepis , Krishna Seshan
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： H01L21/82
- IPC分类号： H01L21/82 ; H01L23/367 ; H01L23/525 ; H01L21/306 ; H01L21/326
摘要：
A method of fabricating an electrically programmable fuse buried under quartz and layers of polyimide with a specific structure to enhance its "thermal" capabilities. The fuse is designed to "blow" and cool off quickly so as not to cause damage to areas above and surrounding the fuse. A passivation layer is added above the fuse to act as a heat sink and absorb and redistribute the heat generated from one localized area to a broader and cooler area. The materials used for the fuse and the heat sink are selected to be compatible with both oxide and polyimide personalization schemes. Modeling of the fuse enables optimizing the characteristics of the fuse, particularly to transmit to the surface of the passivation layer the thermal wave created during programming of the fuse.
公开/授权文献
- US4475893A Power transmission for two-wheeled vehicle 公开/授权日：1984-10-09