发明授权
- 专利标题: Semiconductor device equipped with a heat-fusible thin film resistor and production method thereof
- 专利标题(中): 配有热熔薄膜电阻的半导体装置及其制造方法
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申请号: US491543申请日: 1995-06-16
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公开(公告)号: US5625218A公开(公告)日: 1997-04-29
- 发明人: Hideya Yamadera , Takeshi Ohwaki , Yasunori Taga , Makio Iida , Makoto Ohkawa , Hirofumi Abe , Yoshihiko Isobe
- 申请人: Hideya Yamadera , Takeshi Ohwaki , Yasunori Taga , Makio Iida , Makoto Ohkawa , Hirofumi Abe , Yoshihiko Isobe
- 申请人地址: JPX Kariya JPX Aichi
- 专利权人: Nippondenso Co., Ltd.,Kabushiki Kaisha Toyota Chuo Kenkyusho
- 当前专利权人: Nippondenso Co., Ltd.,Kabushiki Kaisha Toyota Chuo Kenkyusho
- 当前专利权人地址: JPX Kariya JPX Aichi
- 优先权: JPX6-135706 19940617
- 主分类号: H01L23/525
- IPC分类号: H01L23/525 ; H01L27/10 ; H01L29/00
摘要:
A fuse fusible type semiconductor device capable of reducing energy required for fusing and a production method of the semiconductor device. In a semiconductor device equipped with a heat-fusible thin film resistor, the thin film resistor formed on a substrate 1 through an insulating film 2 is made of chromium, silicon and tungsten, and films 7 and 8 of a insulator including silicon laminated on the upper surface of the fusing surface, aluminum films 5 are disposed on both sides of the fusing surface and a barrier film 4. This semiconductor device is produced by a lamination step of sequentially forming a first insulating film 2, a thin film resistor 3, a barrier film 4 and an aluminum film 5 on a substrate 1 for reducing drastically fusing energy, an etching step of removing the barrier film 4 and the aluminum film 5 from the fusing region 31 of the thin film resistor 3, and an oxide film formation step of depositing the insulator including silicon films 7 and 8.
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