发明授权
- 专利标题: High resolution i-line photoresist of high sensitivity
- 专利标题(中): 高灵敏度的高分辨率i线光刻胶
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申请号: US440388申请日: 1995-05-12
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公开(公告)号: US5627011A公开(公告)日: 1997-05-06
- 发明人: Norbert Munzel , Reinhard Schulz , Heinz Holzwarth , Stephan Ilg
- 申请人: Norbert Munzel , Reinhard Schulz , Heinz Holzwarth , Stephan Ilg
- 申请人地址: NY Tarrytown
- 专利权人: Ciba-Geigy Corporation
- 当前专利权人: Ciba-Geigy Corporation
- 当前专利权人地址: NY Tarrytown
- 优先权: CHX1656/92 19920522; CHX3368/92 19921029
- 主分类号: C07D333/24
- IPC分类号: C07D333/24 ; C07C309/28 ; G03F7/004 ; G03F7/038 ; G03F7/039 ; H01L21/027
摘要:
The invention relates to the use of oxime sulfonates of formula 1 ##STR1## wherein R is naphthyl, ##STR2## Ar is an unsubstituted aryl group or an aryl group which carries one or more than one substituent selected from the group consisting of nitro, chloro, bromo, hydroxyl, C.sub.1 -C.sub.4 alkyl, C.sub.1 -C.sub.4 perfluoroalkyl, C.sub.1 -C.sub.4 alkoxy and acid degradable substituents;R.sub.0 is either a R.sub.1 --X group or R.sub.2 ;X is an oxygen or a sulfur atom;R.sub.1 is hydrogen, C.sub.1 -C.sub.4 alkyl or unsubstituted phenyl or phenyl which is substituted by a member selected from the group consisting of chloro, bromo, C.sub.1 -C.sub.4 alkyl and C.sub.1 -C.sub.4 alkoxy, andR.sub.2 is hydrogen, C.sub.1 -C.sub.4 alkyl or an acid-degradable substituent, as radiation-sensitive photoacid generator in a chemically amplified photoresist which is developable in alkaline medium and is sensitive to radiation of a wavelength in the range from 340-390 nm, and to corresponding positive-working and negative-working photoresists for the cited wavelength range.
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