Sulfonium salt, resist composition, and patterning process
    3.
    发明授权
    Sulfonium salt, resist composition, and patterning process 有权
    锍盐,抗蚀剂组合物和图案化工艺

    公开(公告)号:US08173354B2

    公开(公告)日:2012-05-08

    申请号:US12831621

    申请日:2010-07-07

    Abstract: A sulfonium salt having a triphenylsulfonium cation and a sulfite anion within the molecule is best suited as a photoacid generator in chemically amplified resist compositions. Upon exposure to high-energy radiation, the sulfonium salt generates a sulfonic acid, which facilitates efficient scission of acid labile groups in chemically amplified positive resist compositions. Because of substantial non-volatility under high vacuum conditions in the EB or EUV lithography, the risk of the exposure tool being contaminated is minimized.

    Abstract translation: 在分子中具有三苯基锍阳离子和亚硫酸根阴离子的锍盐最适合作为化学增强抗蚀剂组合物中的光致酸产生剂。 在暴露于高能量辐射下,锍盐产生磺酸,这有助于化学放大的正性抗蚀剂组合物中酸不稳定基团的有效断裂。 由于在EB或EUV光刻中的高真空条件下具有显着的非挥发性,所以被污染的曝光工具的风险最小化。

    Ester manufacture
    9.
    发明授权
    Ester manufacture 失效
    酯制造

    公开(公告)号:US4867916A

    公开(公告)日:1989-09-19

    申请号:US128109

    申请日:1987-12-03

    CPC classification number: C07C309/00

    Abstract: Phenol sulphonate esters can be made in a known process by reacting an alkali metal phenol sulphonate salt with an acyl halide in a hydrocarbon solvent at elevated temperatures, but the use of anhydrous materials were strongly advocated because any residual water hydrolyses the acyl chloride in a competitive reaction. However, it becomes particularly difficult and expensive to dehydrate phenol sulphonate salts below about 2% w/w water on a commercial scale and the product obtained by reaction from such partly dehydrated salts can be comparatively impure or reduced in yield. Consequently, changes to the process such as omitting the solvent or using a different acylating agent have been proposed, but these alternatives introduce their own respective manufacturing problems such as entrainment of viscous acyl chloride and anhydride in the product or introduction of a cumbersome and hence expensive recovery process involving an extra distillation step amongst others.The present invention provides a surprisingly convenient modification to the known process in which the esterification and product separation steps are incorporated into a cycle together with an acyl halide preparation step in which residual carboxylic acid and anhydride in solution after product separation is preferably augmented with a replenishing amount of carboxylic acid and then reacted with thiony halide. The resultant ester is readily separable and is obtained in comparatively good yield.

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