发明授权
US5635848A Method and system for controlling high-speed probe actuators 失效
控制高速探头执行器的方法和系统

Method and system for controlling high-speed probe actuators
摘要:
A digital and analog controller for controlling a high-speed probe actuator is disclosed. This method and system provide the probe actuator system with improved damping ratio and reduced impact force, so the throughput of the tester is increased with fast settling actuator armature. With this method and system, the steady-state probe force is less sensitive to the servo system, test probe and variation in the probing distance d. An electronic circuit, which consists of analog operational amplifiers, monostable multivibrators, and D flip-flops, is presented for low-cost applications.
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