发明授权
- 专利标题: Method and system for controlling high-speed probe actuators
- 专利标题(中): 控制高速探头执行器的方法和系统
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申请号: US402417申请日: 1995-03-10
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公开(公告)号: US5635848A公开(公告)日: 1997-06-03
- 发明人: James M. Hammond , James C. Mahlbacher , Kenneth G. Roessler , Michael Servedio , Li-Cheng R. Zai
- 申请人: James M. Hammond , James C. Mahlbacher , Kenneth G. Roessler , Michael Servedio , Li-Cheng R. Zai
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: G01R1/067
- IPC分类号: G01R1/067 ; G01R1/073
摘要:
A digital and analog controller for controlling a high-speed probe actuator is disclosed. This method and system provide the probe actuator system with improved damping ratio and reduced impact force, so the throughput of the tester is increased with fast settling actuator armature. With this method and system, the steady-state probe force is less sensitive to the servo system, test probe and variation in the probing distance d. An electronic circuit, which consists of analog operational amplifiers, monostable multivibrators, and D flip-flops, is presented for low-cost applications.
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