发明授权
US5638206A Confocal optical microscope and length measuring device using this
microscope
失效
共焦光学显微镜和使用该显微镜的长度测量装置
- 专利标题: Confocal optical microscope and length measuring device using this microscope
- 专利标题(中): 共焦光学显微镜和使用该显微镜的长度测量装置
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申请号: US314650申请日: 1994-09-29
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公开(公告)号: US5638206A公开(公告)日: 1997-06-10
- 发明人: Masato Sumiya , Shinji Suzuki
- 申请人: Masato Sumiya , Shinji Suzuki
- 申请人地址: JPX
- 专利权人: Ushiodenki Kabushiki Kaisha
- 当前专利权人: Ushiodenki Kabushiki Kaisha
- 当前专利权人地址: JPX
- 优先权: JPX5-264076 19930929; JPX5-320822 19931129
- 主分类号: G01B9/04
- IPC分类号: G01B9/04 ; G01B11/02 ; G02B21/00 ; G02B21/06 ; G02B21/26
摘要:
A first a confocal optical microscope in which a good image with high contrast can be observed with which a bright image can be observed over a long time interval. The confocal optical microscope has a quarter wave plate arranged in an optical path between an imaging lens and an objective such that it is inclined relative to a reference optics axis extending between the imaging lens and the objective. Furthermore, the confocal optical microscope has a shortwave radiation attenuator for attenuating light radiated from the light source with wavelengths of less than or equal to 340 nm. The confocal optical microscope can form part of a length measuring device which can take a length measurement of a sample to be measured with high measurement accuracy and high reproducibility. The length measuring device also has a movable carrier, a carrier device for a sample to be measured, a computing device, a display device and a control device.
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