发明授权
US5650689A Vacuum airtight device having NbN electrode structure incorporated therein 失效
其中并入有NbN电极结构的真空密封装置

Vacuum airtight device having NbN electrode structure incorporated
therein
摘要:
A field emission element including an electrode structure made of a thin film exhibiting increased adhesive strength. A thin film of niobium nitride (NbN) is formed on a glass substrate by sputtering or the like. The NbN film exhibits increased adhesive strength to a degree sufficient to prevent etching for formation of the film into electrodes from causing peeling of the film.
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