发明授权
- 专利标题： Nonfunctionalized poly(arylene ether) dielectrics
- 专利标题（中）： 非官能化聚（亚芳基醚）电介质
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申请号： US502511申请日： 1995-07-13
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公开(公告)号： US5658994A公开(公告)日： 1997-08-19
- 发明人: William Franklin Burgoyne, Jr. , Lloyd Mahlon Robeson , Raymond Nicholas Vrtis
- 申请人： William Franklin Burgoyne, Jr. , Lloyd Mahlon Robeson , Raymond Nicholas Vrtis
- 申请人地址： PA Allentown
- 专利权人： Air Products and Chemicals, Inc.
- 当前专利权人： Air Products and Chemicals, Inc.
- 当前专利权人地址： PA Allentown
- 主分类号： C08G65/34
- IPC分类号： C08G65/34 ; C08G65/40 ; C08L71/00 ; H01L21/312 ; H01L23/498 ; H01L23/532 ; C08G63/00
摘要：
An article of manufacture comprising a dielectric material on a microelectronic device, such as an integrated circuit, wherein the dielectric material contains a poly(arylene ether) polymer comprising a repeat unit of the structure: ##STR1## wherein m=0 to 1.0; and n=1.0-m; and Ar.sub.1, Ar.sub.2, Ar.sub.3 and Ar.sub.4 are individually divalent arylene radicals, but Ar.sub.1, Ar.sub.2, Ar.sub.3 and Ar.sub.4, other than a diradical 9,9-diphenylfluorene, cannot be isomeric equivalents.
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