发明授权
- 专利标题: Liquid vaporizing apparatus
- 专利标题(中): 液体蒸发装置
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申请号: US592449申请日: 1996-01-26
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公开(公告)号: US5662838A公开(公告)日: 1997-09-02
- 发明人: Tooru Yamaguchi , Kouichirou Tsutahara , Takayuki Suenaga
- 申请人: Tooru Yamaguchi , Kouichirou Tsutahara , Takayuki Suenaga
- 申请人地址: JPX Tokyo JPX Hyogo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha,Ryoden Semiconductor System Engineering Corporation
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha,Ryoden Semiconductor System Engineering Corporation
- 当前专利权人地址: JPX Tokyo JPX Hyogo
- 优先权: JPX4-251461 19920921
- 主分类号: H01L21/205
- IPC分类号: H01L21/205 ; B01D1/00 ; B01D1/14 ; B01D1/26 ; B01D3/34 ; B01J7/02 ; C23C16/448 ; G06F1/26 ; G11C7/00 ; G11C11/407 ; G11C29/00 ; G11C29/06 ; H01L21/31 ; B01F3/04
摘要:
A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.
公开/授权文献
- USD322613S Key telephone station display stand 公开/授权日:1991-12-24