发明授权
US5665430A Chemical vapor deposition method for depositing diamond using a high temperature vacuum substrate mount 失效
使用高温真空基板安装沉积金刚石的化学气相沉积方法

Chemical vapor deposition method for depositing diamond using a high
temperature vacuum substrate mount
摘要:
A method for the chemical vapor deposition of diamond includes the steps of:(a) applying a thermally conductive paint between a substrate seed crystal and an end surface of a vacuum line [having an inner surface and an outer surface], the vacuum line protruding through a mount;(b) holding within a chemical vapor deposition flame the substrate seed crystal upon the mount by applying a vacuum to the substrate seed crystal via the vacuum line protruding through the mount, wherein a portion of an outer surface of the vacuum line in contact with the mount is coated with a thermally conductive lubricant;(c) flowing a heat exchanging fluid through the mount to maintain the surface of the substrate seed crystal at a temperature suitable for chemical vapor deposition of diamond; and(d) directing a deposition species for chemical vapor deposition to deposit diamond onto a surface of the substrate seed crystal.
信息查询
0/0