发明授权
US5665518A Photoresist and monomer and polymer for composing the photoresist
失效
用于构成光致抗蚀剂的光致抗蚀剂和单体和聚合物
- 专利标题: Photoresist and monomer and polymer for composing the photoresist
- 专利标题(中): 用于构成光致抗蚀剂的光致抗蚀剂和单体和聚合物
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申请号: US588607申请日: 1996-01-19
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公开(公告)号: US5665518A公开(公告)日: 1997-09-09
- 发明人: Katsumi Maeda , Kaichiro Nakano , Takeshi Ohfuji , Etsuo Hasegawa
- 申请人: Katsumi Maeda , Kaichiro Nakano , Takeshi Ohfuji , Etsuo Hasegawa
- 申请人地址: JPX Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-011043 19950126; JPX7-203150 19950809
- 主分类号: C07C61/35
- IPC分类号: C07C61/35 ; C07C69/00 ; C07C69/753 ; C07C69/757 ; C07D307/20 ; C07D309/10 ; C07D309/12 ; C08F20/26 ; C08F20/28 ; C08K5/00 ; C08L33/04 ; C08L33/14 ; G03F7/004 ; G03F7/039 ; H01L21/027 ; C07C69/54
摘要:
The present invention provides a vinylmonomer represented with the following general formula (I): ##STR1## wherein R.sup.1 represents a hydrogen atom or a methyl group, R.sup.2 represents a dihydric, bridged cyclic hydrocarbon group having a carbon number in the range of 7 to 13 both inclusive, R.sup.3 represents a group to be decomposed by acid or a hydrogen atom, X represents an alkylene group or a coupling group composed of an oxygen-carbon bond, and Y represents an alkylene group or a coupling group composed of a carbon-carbon bond. A photoresist obtained by polymerizing a monomer in accordance with the invention has a high transparency to FUV having a wavelength of at greatest 220 nm, high sensitivity and resolution to FUV, and a high dry etching resistance, and hence is suitable for exposure light such as FUV having a wavelength of at greatest 220 nm and, in particular, ArF excimer laser. The photoresist makes it possible to carry out fine patterning required for the fabrication of a semiconductor element.
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