发明授权
- 专利标题： Polishing aparatus and method
- 专利标题（中）： 抛光装置和方法
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申请号： US563295申请日： 1995-11-28
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公开(公告)号： US5679059A公开(公告)日： 1997-10-21
- 发明人: Toyomi Nishi , Tetsuji Togawa , Harumitsu Saito , Manabu Tsujimura , Hiromi Yajima , Kazuaki Himukai , Shoichi Kodama , Yukio Imoto , Riichiro Aoki , Masako Watase , Atsushi Shigeta , Shiro Mishima , Gisuke Kouno
- 申请人： Toyomi Nishi , Tetsuji Togawa , Harumitsu Saito , Manabu Tsujimura , Hiromi Yajima , Kazuaki Himukai , Shoichi Kodama , Yukio Imoto , Riichiro Aoki , Masako Watase , Atsushi Shigeta , Shiro Mishima , Gisuke Kouno
- 申请人地址： JPX Tokyo JPX Kawasaki
- 专利权人： Ebara Corporation,Kabushiki Kaisha Toshiba
- 当前专利权人： Ebara Corporation,Kabushiki Kaisha Toshiba
- 当前专利权人地址： JPX Tokyo JPX Kawasaki
- 优先权： JPX6-319289 19941129; JPX6-330209 19941206; JPX6-330210 19941206
- 主分类号： H01L21/304
- IPC分类号： H01L21/304 ; B08B1/04 ; B24B27/00 ; B24B37/34 ; B24B51/00 ; B24B55/12 ; F24F3/16 ; H01L21/00 ; B24B1/00
摘要：
A polishing apparatus for polishing a surface of a workpiece includes a housing unit, a partition wall partitioning an interior of the housing unit into a first chamber and a second chamber, a polishing section disposed in the first chamber and having a turntable with an abrasive cloth mounted on an upper surface thereof and a top ring positioned above the turntable for supporting the workpiece to be polished and pressing the workpiece against the abrasive cloth, and a cleaning section disposed in the second chamber and cleaning the workpiece which has been polished. The polishing apparatus further includes a transferring device for transferring the workpiece which has been polished from the polishing section to the cleaning section through an opening and an exhaust system for exhausting ambient air from each of the polishing section and cleaning section separately and independently.
公开/授权文献
- US4512377A Beverage dispensing apparatus 公开/授权日：1985-04-23