发明授权
US5689106A Optical device assembly having a metallic bump bonding together two
planar optical components, and its preparation
失效
具有将两个平面光学部件接合在一起的金属凸块的光学器件组件及其制备
- 专利标题: Optical device assembly having a metallic bump bonding together two planar optical components, and its preparation
- 专利标题(中): 具有将两个平面光学部件接合在一起的金属凸块的光学器件组件及其制备
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申请号: US361622申请日: 1994-12-22
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公开(公告)号: US5689106A公开(公告)日: 1997-11-18
- 发明人: Michael J. Dahlin
- 申请人: Michael J. Dahlin
- 申请人地址: CA Goleta
- 专利权人: Santa Barbara Research Center
- 当前专利权人: Santa Barbara Research Center
- 当前专利权人地址: CA Goleta
- 主分类号: H01L25/04
- IPC分类号: H01L25/04 ; H01L31/0203 ; G01J3/50
摘要:
An optical device assembly includes a planar optical filter and a planar sensor having an optically active area. The optical filter and the sensor are joined together with a gap therebetween by a metallic bump extending between the optical filter and the sensor. The metallic bump, which is preferably indium, is positioned at a location outside of the optically active area of the planar sensor. The metallic bump is preferably formed by vapor depositing an indium subbump on the optical filter and another indium subbump on the planar sensor, in each case outside of their optically active areas, and thereafter pressing the two subbumps together to complete the bonding.
公开/授权文献
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